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Chemical Mechanical Polishing LiTaO3 Wafer from Ultraviolet to Infrared Wide Transparency Range
Lithium tantalate (LiTaO3) has piezoelectric, electro-optical and nonlinear optical characteristics, and a wide transparency range going from ultraviolet to infrared. It is desirable that LiTaO3 wafer was a smooth surface in order to function with good quality. Chemical mechanical polishing (CMP) has been used to planarize integrated circuits (ICs) or obtain a high surface quality of the substrates. This paper investigates the effect of citric acid as an additive in the slurry for LiTaO3 CMP. The roughness of the wafers was measured by an atomic force microscopy (AFM, XE-100) after polishing. The slurry, which contains citric acid as an additive, has a higher material removal rate and friction force than a slurry without an additive. After polishing, the surface roughness of the LiTaO3 wafer can be reduced down to 1.7A of Ra.
Transmission Range | 0.275 - 5.25 µm (thickness 8 mm); High transmittance from 0.4 – 4um |
Refractive Index | no = 2.139, ne = 2.139 @633 nm |
Reflection Loss | 13.17%@0.633 µm |
Density | 7.4564 g/cm3 |
Melting point | 1650°C |
Molecular Weight | 235.89 |
Thermal Conductivity | 4.6 W/m·K ; 8.78 W/m·K |
Spec. Heat Capacity | 424 J/(K·kg) |
Hardness (Mohs) | 750 |
Elastic Coefficient | C11 = 230; C12 = 42; C13= 79; C14= -11; C33= 276; C44 = 95.9 GPa |
Dielectric Constant | 41-53 @298K |
Solubility in Water | insoluble |
Crystal Structure | Single crystal, synthetic |
Crystal Type | trigonal, a = 5.15 Å c = 13.77 Å |
Cleavage Planes | no cleavage |
Application | electro optic Q-switch, integrated optical substrate, sensor, frequency converter |
Product | Ltihium Tantalate (LT) Wafer | |
Diameter | 3inch | 4inch |
76.2mm | 100mm | |
S/D | 20/10 | 20/10 |
TTV | <3um | <3um |
PLTV | >95% | >95% |
Warp | <20um | <40um |
BOW | <20um | <30um |
Ra | <0.5nm | <0.5nm |
FAQs:
A: We look at ourselves as the piezo wafer specialist. We are the very first to work with Single Crystal Quartz in China about 30 years ago. Then gradually we step in the field of LiNbO3, LiTaO3, Quartz glass, LGS, CTGS etc. Especially, if you are looking for a piezo quartz supplier, we are the ultimate choice! We export millions of quartz blanks each year because we master the AT, SC and IT cuts with superior angle precision.
A: Yes, of course. We can fabricate as per your request. In addition, we are so experienced with piezo wafers that we can provide you relevant suggestions if you are not 100% sure about your choice. Besides, we do have some standard wafers in stock, please check with us.
A: Yes, we would suggest you go with the courier agent you are most familiar with (DHL, FedEX, UPS etc.). We can ship via your account. And, of course, we will pack the products safely in acceptable size to help you save the shipping cost. If you need us to take care of the freight, it’s also not a problem. We also have good discount with the international courier companies.
A: The wafer products are fragile and sometimes expensive. The last thing, as the manufacturer, we want to see is the products we make were damaged during courier. As a result, we will pack the wafers adequately and put them in a proper carton filled with buffer sponge. However, accidents are inevitable sometimes. So, please follow the “Acceptance check” steps shown in the drawings below. If the unwanted happened, we will either give the replenishment or refund if you follow the checking steps.
A: Sure. Factory inspection is important for large quantity purchase and long-term cooperation. Face to face discussion is what we mostly confident with. During the past years, big names around the world have witnessed our progress in factory build-up. These days, due to the Covid-19 pandemic, we also had the experience of videoconferencing with global buyers.
Acceptance Check
