Scratches Dusts Optical Testing Equipment Semiconductor Surface Detector 1.8μM

Semiconductor Material Surface Defect Detector

Applications

For the process control and yield management of blank mask in the fields of semiconductor display and

integrated circuit chip manufacturing, we use high throughput optical testing technologies to make fast and

accurate automatic detection for the surface defects of blank mask. According to professional user needs,

we have developed series of high throughput MASK inspection machines with reliable quality and high cost

performance ratio, to help glass substrate, mask and panel manufacturers to identify and monitor the mask

defects, reduce the risk of yield and improve their independent ability of R&D for core technologies.

Working Principle

With regards to level and type of surface defect, 4x telecentric lens, specific angle ring light and coaxial light

source are selected as the visual approach. When the device is running, the sample moves along the X

direction and the vision module carries out defect detection along the Y direction.

Features

Detection Images

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