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Dummy Grade 6Inch Sic Substrate Wafer Dia150mm 4H-N 500mm Thickness

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Address: Rm5-616,No.851,Dianshanhu avenue, Qingpu area，Shanghai city，CHINA

Contact name:Wang

SHANGHAI FAMOUS TRADE CO.,LTD

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Dummy Grade 6Inch Sic Substrate Wafer Dia150mm 4H-N 500mm Thickness

Country/Region	china
City & Province	shanghai shanghai
Categories	Plastic Sheets

Product Details

6inch sic substrates ,6inch sic wafers, sic crystal ingots ,

sic crystal block ,sic semiconductor substrates,Silicon Carbide Wafer

6 inch diameter, Silicon Carbide (SiC) Substrate Specification
Grade		Zero MPD Grade	Production Grade	Research Grade	Dummy Grade

Diameter		150.0 mm±0.2mm

ThicknessΔ		350 μm±25μm or 500±25un

Wafer Orientation		Off axis : 4.0° toward< 1120> ±0.5° for 4H-N On axis : <0001>±0.5° for 6H-SI/4H-SI

Primary Flat		{10-10}±5.0°

Primary Flat Length		47.5 mm±2.5 mm

Edge exclusion		3 mm

TTV/Bow /Warp		≤15μm /≤40μm /≤60μm

Micropipe Density		≤1 cm-2	≤5 cm-2	≤15 cm-2	≤100 cm-2

Resistivity	4H-N	0.015~0.028 Ω·cm

	4/6H-SI	≥1E5 Ω·cm

Roughness		Polish Ra≤1 nm

		CMP Ra≤0.5 nm

Cracks by high intensity light		None		1 allowed, ≤2 mm	Cumulative length ≤ 10mm, single length≤2mm

Hex Plates by high intensity light		Cumulative area ≤1%		Cumulative area ≤2%	Cumulative area ≤5%

Polytype Areas by high intensity light		None		Cumulative area≤2%	Cumulative area≤5%

Scratches by high intensity light		3 scratches to 1×wafer diameter cumulative length		5 scratches to 1×wafer diameter cumulative length	5 scratches to 1×wafer diameter cumulative length


Edge chip		None		3 allowed, ≤0.5 mm each	5 allowed, ≤1 mm each

Contamination by high intensity light		None

Because the 6inch size crystal grow ＆process(lapped and polishing) technical difficulties,we just can provide the 6inch Dummy Grade as common products in 30days and Productions Grade but needing to be reserved for 90days.

About our company

SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.

We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components widely used in electronics, optics, optoelectronics and many other fields. We also have been working closely with many domestic and oversea universities, research institutions and companies, provide customized products and services for their R&D projects.

It's our vision to maintaining a good relationship of cooperation with our all customers by our good reputatiaons.