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GaN Gallium Nitride Wafer Thickness 325um - 375um Freestanding

Shanghai GaNova Electronic Information Co., Ltd.

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Contact name:Xiwen Bai (Ciel)

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GaN Gallium Nitride Wafer Thickness 325um - 375um Freestanding

Country/Region china
City & Province shanghai shanghai
Categories Testing Equipment
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Product Details

5*10.5mm2 M Face Free-Standing GaN Substrates Thickness 350 ±25 µm

5*10.5mm2 M-face Un-doped SI-type free-standing GaN single crystal substrate Resistivity > 106 Ω·cm RF devices wafer

 



The freestanding GaN substrate has a great potential to homo-epitaxy of optoelectronic and electronic devices with high reliability and performances. Here, we realized the growth of freestanding bulk GaN on dual-stack multilayer graphene as an insertion layer by the hydride vapor phase epitaxy (HVPE) method.
 

M face Free-standing GaN Substrates
Item

GaN-FS-M-U-S

 

GaN-FS-M-N-S

 

GaN-FS-M-SI-S

 

 

 

 

 

 

 

 

 

 

Remarks:

A circular arc angle (R < 2 mm) is used for distinguishing the front and back surface.

Dimensions5 x 10 mm2
Thickness350 ±25 µm
Orientation

M plane (1- 100) off angle toward A-axis 0 ±0.5°

M plane (1- 100) off angle toward C-axis - 1 ±0.2°

Conduction TypeN-typeN-typeSemi-Insulating
Resistivity (300K)< 0.1 Ω·cm< 0.05 Ω·cm> 106 Ω·cm
TTV≤ 10 µm
BOW- 10 µm ≤ BOW ≤ 10 µm
Front Surface Roughness

< 0.2 nm (polished);

or < 0.3 nm (polished and surface treatment for epitaxy)

Back Surface Roughness

0.5 ~1.5 μm

option: 1~3 nm (fine ground); < 0.2 nm (polished)

Dislocation DensityFrom 1 x 105 to 3 x 106 cm-2
Macro Defect Density0 cm-2
Useable Area> 90% (edge exclusion)
PackagePackaged in a class 100 clean room environment, in 6 PCS container, under a nitrogen atmosphere

 

Appendix: The diagram of miscut angle

 

 

If δ1= 0 ±0.5 degree, then M plane (1- 100) off angle toward A-Axis is 0 ±0.5 degree.

If δ2= - 1 ±0.2 degree, then M plane (1- 100) off angle toward C-Axis is - 1 ±0.2 degree.

 

 

About Us

We specialize in processing a variety of materials into wafers, substrates and customized optical glass parts.components widely used in electronics, optics, opto electronics and many other fields. We also have been working closely with many domestic and oversea universities, research institutions and companies, provide customized products and services for their R&D projects. It's our vision to maintaining a good relationship of cooperation with our all customers by our good reputations.

 

 

FAQ

Q: Are you trading company or manufacturer ?
We are factory.
Q: How long is your delivery time?
Generally it is 3-5 days if the goods are in stock.
or it is 7-10 days if the goods are not in stock, it is according to quantity.
Q: Do you provide samples ? is it free or extra ?
Yes, we could offer the sample for free charge but do not pay the cost of freight.
Q: What is your terms of payment ?
Payment <=5000USD, 100% in advance.
Paymen >=5000USD, 80% T/T in advance , balance before shippment.

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