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Thermal Evaporator PVD Coating Machine Optic Thin Film Production

Guotaivac Co., Ltd
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Address: No.618, West Kelin Road, Wenjiang District, Chengdu 610000, China

Contact name:Yuan Pan

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Guotaivac Co., Ltd

Thermal Evaporator PVD Coating Machine Optic Thin Film Production

Country/Region china
City & Province chengdu
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Product Details

Guotai Thermal Evaporator Machine With Customized Features For Optic Thin Film Production

 

1. Product Description:

 

The Optical Coating Systems manufactured by Guotai are designed to maximize coating uniformity and production throughput, and have supported to a wide range of coating applications to include anti-reflection and highly reflective coatings, edge filters, beam splitters, optical filters, laser diodes, polarizers, gain flattening filters, and other complex non-quarter wave design including low stress and high laser damage threshold coatings.

 

 

 

 

2. Main Features:

 

  • Flexible Configuration

The system can be carefully tailored to support client’s specific coating application and production requirements. Chamber sizes ranges from 400mm to 2700mm, which can be used as laboratory or mass production equipment. Configuration options include Thermal Evaporation, Electron Beam Evaporation, and Electron Beam Evaporation with Ion Assist; Substrate fixturing is available in single rotation, planetary, calotte, flip planetary, and unique arrangement for specific requirements; Support front side heating or back side heating, or both.

 

Aluminium Coating Machine

 

  • Excellent Performance and Reliability

Guotai recognizes that user-friendliness and reliability of optical coating equipment is paramount to client’s success. The system incorporates proven design features based on decades of experience that produce exceptional results with easy to use software and dependable run to run consistency. We strive to continuously obtain customer feedback from coating engineers, operators, and maintenance personnel to improve design features that will minimize system downtime and increase overall productivity. Subsystem equipment of our systems are from reliable and brand manufacturers such as Baosi, Edwards, Inficon, Burkert, Omron to name a few. This allows our clients to benefit from the depths of Guotai and its vendors for the availability of service and spare parts.

 

Aluminium Coating Machine

 

  • Coating Process Capability and Support

The system includes optional process development, system calibration, film characterization and uniformity adjustment to less than 0.5%. They can be delivered with multiple, fully developed, production-ready coating processes, pre-programmed to minimize system downtime between production changeover's and to maximize run efficiencies and product yields. Calibration of the process is so consistent that new designs may be supplier to the operator from a remote site with the results from a test run analyzed and a small adjustment in calibration made before final production. Designed for run-to-run repeatability and to deliver excellent results after a minimum number of test coatings, the system lends itself to a fully automatic operation reducing time, manpower, and costs-even with high layer counts and complex layer stacks.

 

Aluminium Coating Machine

 

3. Model & Specifications:

 

ItemsSpecifications
ModelZZS-600ZZS-800ZZS-920ZZS-1100ZZS-1300ZZS-1550ZZS-2250ZZS-2700
Size (mm)Φ600xH750Φ800xH900Φ920xH1000Φ1100xH1300Φ1300xH1500Φ1550xH1600Φ2250xH1700Φ2700xH1850
StructureVertical Chamber with Single Door, SUS304 Stainless Steel, Water Cooled
Wavelength Applied200nm~25000nm
Rotating Speed0~30 RPM (Adjustable)
Pumping SpeedAtmospheric Pressure to 1.5x10-3Pa, ≤20min
Ultimate Vacuum9.0x10-5Pa
Coating MaterialH4, Ge, Au, Ag, Cu, Al, SiO, Ta2O5, TiO2, Ti3O5, ZrO2, ZnS, Al2O3, Nb2O5, SiO2, MgF2, YbF3, ZnZs, ZnSe
Substrate FixturingSingle or Split Rotating Dome, Planetary, Calotte, Flip Planetary or unique arrangment for special requirement
Substrate HeatingBack Side or Front Side Heating, can achieve 350℃ Max.
Exhausting UnitRough Vacuum Pump + High Vacuum Pump + Polycold (up to the coating requirement)
Vacuum ControllerVacuum Controller, Penning Gauge, Pirani Gauge
Deposition SourcesThermal Evaporation, Electron Beam Evaporation, Electron Bean Evaporation with Ion Assist. (up to the coating requirement)
Air Charging UnitMFC or APC
Thickness ControllerQuartz Crystal Controller
Control SystemAutomatic and Manual
ApplicationAR, UV/IR Cut Filter, AF, Enhanced Relfection Coating,  Band Pass Filter, RGB Filter, Photocatalst, HR Coating, etc.
Remarks:
1.Final configuration subject to customer's requirement.
2.Customized features are supported.

 

4. About Us

Guotai is an ISO 9001& ISO14001 certified manufacturer of high-performance optical filters and thin-film coating systems. Registered in 2013, Guotai has rapidly grown from a small startup to a China-based leader in precision optical thin film systems. Guotai's engineering team has been instrumental in achieving this growth by refining our advanced E-Beam deposition process, designing and building our coating equipment, and dedicating a large amount of resources to research and development of optical coating process. By so far, Guotai has obtained more than 30 patents regarding the coating systems and a few of national and regional prizes.

 

Aluminium Coating Machine

 

Guotai Provides:
Design & Development & Manufacture : Vacuum Coating Machine / Mechanical Parts / Electrical Parts / Coating Process
Services: Equipment Installation / Maintenance / Repair / Technical Support / Thin Film Production

 

Aluminium Coating Machine

 

Electron beam evaporation vacuum coating machine adopts electron gun evaporation coating method, equipped with electron gun, optional 1 to 3 groups of resistance evaporation sources, and optional ion source for cleaning and auxiliary coating capabilities. The structure design is reasonable, the performance is stable and reliable, and the operation is simple and convenient. It is widely used in research institutes and laboratories to prepare metals, compounds (oxides), conductive films, optical films, etc.

 

Features:

  • It adopts E-type electron gun with stable output power, domestic high-quality or imported.
  • The rotating parts are introduced by magnetic fluid, and the sealing is reliable for long-term operation.
  • The work piece rotating seat runs smoothly and reliably, and can be equipped with a planetary work piece carrier.
  • It adopts PLC + touch screen control, interlocking protection, and can be automatically controlled throughout the entire process, including the vacuum system, the baking system, and the entire evaporation coating process.
  • All parts are from well-known domestic manufacturers or imported well-known brands.

 

 

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