Active Member
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[China]
Address: Mengzhuang viliage, Xige town, Fengnan District, Tangshan, Hebei, China
Contact name:Tina
TANGSHAN YIFEI TRADING CO.,LTD |
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Microwave plasma chemical vapor deposition furnace microwave
heating system
This equipment with excellent performance of high degree of
ionization, high electron temperature and electron density, wide
applicable pressure range, no internal electrode contamination, the
microwave plasma has wide range of application in the field of
material surface treatment, preparation of diamond films, chemical
vapor deposition, etching and methane reforming hydrogen,
long-lasting phosphorescent materials, ceramic sintering, carbon
nano tube modified, nano powder synthesis and processing of water
pollution.
Vertical reactor design allows a high plasma density, symmetrical
microwave generating device produce a more uniform plasma
environment.
There is no internal electrode in resonator of microwave plasma CVD
furnace; it could avoid contamination generated by electrode
discharge, furthermore, with wide operation pressure range, high
density and large area of plasma and high stability, as there is no
contact with vacuum wall, it avoid pollution to the films from
vacuum wall.
| Material demand | any non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc.. |
| Microwave frequency | 2.45GHz±50MHz |
| Heating modes | Microwave heating |
| Max power | 3KW(adjustable) |
| Max working temperature | 1200℃ |
| Long term working temperature | Less than 1100℃ |
| Temperature measurement | Microwave field special temperature sensor |
| Temperature control precision | ±2℃ by microwave field special temperature sensor |
| Quartz tube size | OD102mm/ID92mm*L1000mm |
| Heating container qty | 0.5-3L, Optionally 2 containers |
| Quartz tube size | OD220mm/ID210mm*H360mm |
| Configuration of vacuum system( for optional) | Simple mechanical pump and stainless flange |
| Rising speed (standard) | 0～1000℃/min programmable and segmented control and set freely |
| Temperature control system | Controlled by PLC, no touch screen |
| Machine size(L*W*H) | 1000mm*750mm*1830mm |
| Microwave leakage | Less than or equal to 0.4mW/cm2 |
| Reference spare parts | high temperature gloves 1 suit, Manual instruction 1 copy |
| Model | WBMW-QXCJ4 | ||
| Material demand | any non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc.. | ||
| Microwave frequency | 2.45GHz±50MHz | ||
| Heating modes | 1 Microwave heating mode 2 Electric heating mode 3 Combination microwave and electric heating mode | ||
| Max power | 4KW(adjustable) | ||
| Temperature measurement | Microwave field special temperature sensor | ||
| Temperature control precision | ±2℃by microwave field special temperature sensor | ||
| Heating tube material | Quartz tube | High-temperature alloy tube | Corundum tube |
| Max heating temperature of heating tube | 1200℃ | 1200℃ | 1600℃ |
| Tube size(OD/ID*length) | 45mm/35mm*1200mm, max OD 60mm | ||
| Heating rate | Less than or equal to 200℃/min | No limit | Less than or equal to 50℃/min |
| Length of constant temperature area | Standard length 10mm, 10mm-1000mm for optional | ||
| Heating area | Heating several area at the same time | ||
| Air circuit flange | Stainless flange | ||
| Mass flow control | Alicat mass flow controller, Mass flow controller cabinet, | ||
| Air circuit qty | 2 or 3 | ||
| Flow rate range | 0-1SLM(standard L/min) Nitrogen calibration | ||
| Accuracy | ±0.2% F.S | ||
| Response time | Less than or equal to 1 second | ||
| Work pressure | Inlet pressure 0.05-0.35Mpa(meter pressure), flow spec less than or equal to 10SLM | ||
| Connection of system | Quick links flexible tube, high vacuum manual block valve | ||
| Spec | High vacuum | ||
| Vacuum range of system | Standard atmosphere 10-3Pa | ||
| Configuration of vacuum system( for optional) | Simple mechanical pump and stainless flange | ||
| Furnace container size(L*W*H) | 700mm*350mm*´530mm | ||
| Heating container(standard) | Set according to tube size, length of heating area, and qty of heating area | ||
| Rising speed (standard) | 0～1000℃/min programmable and segmented control and set freely | ||
| Temperature control system | Controlled by PLC, no touch screen | ||
| Machine size(L*W*H) | 1500mm*750m*1560mm | ||
| Microwave leakage | Less than or equal to 0.4mW/cm2 | ||
| Reference spare parts | high temperature gloves 1 suit, Manual instruction 1 copy | ||
