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Address: No5,Building,No.413,Mudong Road,Mudu Town,Wuzhong District,Suzhou City Jiangsu Province
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The primary role of lightweight linear servo motors in semiconductor manufacturing equipment is to provide precise and controlled linear motion for critical processes. These motors play a crucial role in enhancing the efficiency, accuracy, and reliability of semiconductor production processes. Key contributions include:
1. Precision Wafer Handling: Lightweight linear servo motors enable accurate and smooth handling of semiconductor wafers throughout various manufacturing stages. This precise motion is essential for ensuring proper alignment, positioning, and transfer of wafers during processes like lithography, etching, and inspection.
2. High-Speed Positioning:Semiconductor manufacturing demands rapid and precise positioning of components and tools. Lightweight linear servo motors offer high-speed positioning capabilities, allowing for quick adjustments and precise alignment of equipment, resulting in improved production throughput.
3. Optimal Alignment: The motors aid in aligning optical components, such as lenses and mirrors, in semiconductor tools like lithography machines. This alignment ensures the accurate projection of patterns onto wafers, a critical step in creating microchips with intricate features.
4. Precision Etching and Deposition: In processes like plasma etching and thin-film deposition, lightweight linear servo motors control the movement of substrates and masks with high precision. This ensures uniform material removal or deposition, contributing to the quality and reliability of semiconductor devices.
5. Wafer Inspection: For quality control, semiconductor wafers undergo thorough inspection. Linear servo motors facilitate the movement of inspection tools, enabling precise scanning and measurement of the wafers' surfaces for defects or irregularities.
6. Wafer Testing: Before packaging, semiconductor wafers undergo testing to ensure their functionality. Lightweight linear servo motors aid in positioning probes accurately, allowing for efficient and accurate testing of individual chips on the wafer.
7. Automated Manufacturing: Lightweight linear servo motors integrate into automated semiconductor production lines, contributing to the overall efficiency and reliability of manufacturing processes. They enable seamless integration with control systems and automation platforms.
In summary, lightweight linear servo motors play a pivotal role in semiconductor manufacturing equipment by providing precise, high-speed, and controlled linear motion. Their contributions extend to various stages of semiconductor production, ensuring accurate positioning, alignment, and movement critical for the creation of advanced microchips and electronic components.
| Parameter | Value |
|---|---|
| Motor Type | Linear Servo Motor,Linear voice coil motor |
| Rated Frequency | 100Hz |
| Peak force(Fp) | 120N |
| Noise Level | Low |
| Ambient Temperature | -20℃~+120℃ |
| Peak current(lp) | 4.9A |
| Voltage | 24V |
| Mounting Method | Flange |
| Length of the Coil(mm) | 30mm |
| Speed | High |
| Peak Force | 75N |
| B Series--MLCB(Dynamic) MLFB(Stator) | |||||||
| Model/Par | MLCB-0040-075-00 | MLCB-0080-135-00 | MLCB-0145-255-00 | ||||
| Peak force(Fp) | N | 120 | 240 | 435 | |||
| Peak current(lp) | Amps | 4.9 | 4.8 | 4.45 | |||
| Continuous force(Fc) | N | 40 | 80 | 145 | |||
| Continuous current(lc) | Amps | 1.65 | 1.6 | 1.48 | |||
| Actuator constants(DC motor conversion/3p)(Ka) | N/W | 8.4 | 12.1 | 16.3 | |||
| Constant Thrust(L-L)(Kf) | N/Amps | 24.6 | 49.5 | 97.5 | |||
| Back EMF constant(L-L)(Kb) | V/m/sec | 14.2 | 28.6 | 56.3 | |||
| Electrical constant(Te) | ms | 0.3 | 0.3 | 0.3 | |||
| Resistance(L-L)(R) | @25℃Ω | 5.6 | 11.2 | 23.4 | |||
| Inductance(L-L)(l) | mh | 1.8 | 3.78 | 7.5 | |||
| Heat transfer coefficient(Rth) | ℃/W | *3.2 | *1.86 | **0.95 | |||
| Coil maximum temperature(Tmax) | ℃ | 120 | 120 | 120 | |||
| Magnet Pole pitch(2T) | mm | 30 | 30 | 30 | |||
| Mover weight | Kg | 0.28 | 0.49 | 0.97 | |||
The linear voice coil mover only has a coil without a magnet, There
is no suction between the moving stator, non-cogging effect smooth
operation.
Light mover mass,can achieve high speed acceleration
Smooth thrust characteristics,with the application of grating ruler
to achieve high precision.
The stroke can be extended arbitrarily silent and maintenance-free.
Imported epoxy resin high temperature and high pressure vacuum
filling,high flexible power cable.
Widely used in semiconductor manufacturing equipment,flat panel
display industry precision testing equipment laser cutting,laser
marking, machine vision testing equipment
Modular design,can be processed and customized.
It is widely used in semiconductor manufacturing equipment,flat panel display industry precision testing equipment laser cutting,laser marking, machine vision testing equipment,Modular design,can be processed and customized.
SUPT offers the Linear Servo Motor with the brand name MLCB series . This product is manufactured in Jiangsu, China and is certified with ISO9001. The minimum order quantity is ≥1PCS. The price is $145-$160 and it is packed in carton packaging. The delivery time is 1-5 products 5-7 days shipment, samples 3-5 days, bulk to be negotiated. The payment terms are T/T . The supply ability will depend on the interview.
Linear Servo Motor offers customers comprehensive technical support and services. Our
team of professionals are available to answer any questions you may
have about our products and services. We offer a resources,
including product manuals, installation and troubleshooting guides,
and FAQs. We also provide onsite technical support and services,
such as installation, maintenance, repairs, and upgrades.
If you need help, please contact us at any time. We look forward to
hearing from you and helping you get the most out of your Linear Servo Motor product.
We provide quality packaging and shipping for our Hollow Core Motor products to ensure their safe arrival. Each motor is packed and shipped with the following steps:
We take pride in making sure our customers receive their products in perfect condition. If you have any questions or concerns about packaging and shipping, please don't hesitate to contact us.
