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Motorized High Vacuum Butterfly Valve used for Chip Production Industry
Electric Butterfly Valve Application
DCL electric motorized high vacuum butterfly valves are widely used on crystal growth furnaces, which are used for monocrystalline silicon wafer production. These valves can be zero leakage in very low pipe pressure, which is lower to 1.3*10-4Pa. Forged stainless steel body and special sealing structure design, to ensure valve’s long life cycles. Electric actuators are CSA/UL certificated and CE marked.
Sizes: DN50 to DN400
Electric Butterfly Valve Features
Concentric electric butterfly valve
Electric Butterfly Valve Specification
| Actuator Type | Butterfly Valve(≤PN1.0MPa) | Ball Valve(≤PN1.6MPa) | Vent Valve(≤PN0.1MPa) |
| DCL-02 | ≤DN40 | ≤DN32 | |
| DCL-05 | DN50~65 | DN40 | DN50~80 |
| DCL-10 | DN80~100 | DN50~65 | DN100~200 |
| DCL-20 | DN125~150 | DN80~100 | DN250~300 |
| DCL-40 | DN200 | DN125 | DN350~450 |
| DCL-60 | DN250 | DN150 | DN500~600 |
| DCL-100 | DN300 | DN200 | DN700~800 |
| DCL-160 | DN350~400 | DN250 | DN900 |
| DCL-250 | DN450~600 | DN300~350 | DN1000~1200 |
