Active Member
|
[China]
Address: NO 21st ChuangXing Road, Shangsha community , Changan Town, Dongguan city Guangdong province, China
Contact name:Admin deng
Dongguan Ming Rui Ceramic Technology Co.,ltd |
|
|
Alumina Zirconia Ceramic End Effectors Ceramic Wafer Pick Up Tools
Ceramic End - Effectors, Endeffector, Endeffectors, Wafer Carrier, Wafer Chuck, Wafer Pick - Up Tools, Wafer Tools: NetMotion, Inc. web site
| Ceramics have superior mechanical, electrical, and thermal properties ideal for quality components. the durability of fine ceramics makes it ideal for mechanical and thermal loads that are abrasive and in chemically harsh environment. | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Standard 12" and 8" Coated Alumina End-Effectors | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Properties & Application Note | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| Application Note | ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
| ||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||||
End effectors constitute the end of the robot arm which handles and moves the semiconductor wafer between positions. It’s basically the robot’s hand so it is important that it be thermally and dimensionally stable and not contaminate the chamber with particles or chemical contaminants.
Ceramic end effectors are used for their stiffness and high strength, meaning the robot arm settles to its final position faster than with aluminium. Additionally, the robot’s motion itself is faster, optimising positioning accuracy and increasing efficiency.
The ceramic material is chosen based on the deposition chemistry to which it will be exposed. For example, if plasma is used, a minimum 99.5% alumina must be used.
The same consideration of gas chemistry is needed for determining the interior materials for plasma etch processes. If an anodised aluminium or alumina chamber is used with fluorinated gases or oxygen plasma then an yttria coating may be used on theanodised aluminium walls to prevent chemical attack. Yttria has superior erosion resistance and low particulation compared with alumina or thermal spray alumina coating.
Industrial Ceramic Intriduction
Aluminium Oxide, Al2O3 is the most widely applied and cost
effective technical ceramic material. It offers a combination of
superior mechanical strength and electrical properties, wear
resistance and corrosion resistance. The maximum working
temperature is up to 1700 °C with relatively high thermal
conductivity. It is also an electrically insulating material with a
high electrical resistivity. The good corrosion resistance makes it
insoluble in water and slightly soluble in strong acid and alkaline
solution.
Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components
for a wide range of application like Mechanical Equipment,
Electronic & Electrical, Oil Drilling, Medical, Chemical
Industry etc. According to actual application and customer's
requirement, the purities vary from 95%-99.7% and the forming
methods will be different. The forming methods applied in our plant
include dry pressing, isostatic pressing, injection moulding,
extrusion moulding. With experienced engineers and talented
workers, we are confident to offer high quality, high precision,
complex components for customers worldwide.
FAQ
Q: Are you trading company or manufacturer ?
A: We are factory.
Q: How long is your delivery time?
A: Generally it is 5-10 days if the goods are in stock. or it is
15-20 days if the goods are not in stock, it is according to
quantity.
Q: Do you provide samples ? is it free or extra ?
A: Yes, we could offer the sample for free charge but do not pay
the cost of freight.
Q: What is your terms of payment ?
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30%
T/T in advance ,balance before shippment.
If you have any other question, pls feel free to contact us .
