Water Cooling Maglev Lubrication Turbomolecular Pump CE
The magnetically levitated molecular pumps are the pumps of which
shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation
equipment developed by KYKY for meeting application requirements
for fields of modern semiconductor manufacturing, chip
manufacturing, industrial plating and scientific instruments.
Technologies:
- Control Technology for Magnetic Bearing: The adopted
electromagnetic is a 5-axis magnetically levitated. This design can
have dynamic response and timely adjustment by means of dynamic
active closed-circuit magnetic suspension control technology based
on advanced international control theory, so as to guarantee such
significant advantages of the high-speed shafting as stable
levitated and reliable operation.
- Motor Drive Control Technology: High-efficiency high-speed DC motor
and servo control system are applied to series magnetically
levitated pumps, so to have maximum energy of the motor and to
compensate the rotating speed of shafting automatically, thereby
realizing stable start-up, reliable operation and automatic
regulating function of dynamic energy.
- Carbon fiber composite rotor technology: The turbo rotors of serial
magnetic suspension molecular pumps are made by compounding
high-strength aluminum alloy and light-weight carbon fiber. In
comparison with all aluminum alloy rotors, the turbo rotors are
characterized of great reduction of weight and great improvement of
strength, so that targets of high rotating speed, high performance
and high reliability are achieved.
- Corrosion resisting technology: Surfaces of parts in chambers of
serial magnetic suspension molecular pumps are treated with special
process, so that the surfaces can resist corrosion caused by
corrosive gases in semiconductor manufacturing processes for a long
time. In addition, such inert gases as N2 are fully filled in
shafting of the pumps to protect the low vacuum parts in the pumps,
so that function of stably exhausting corrosive gases for long
periods is realized.
- Heating temperature control system: Series magnetically levitated
molecular pumps are equipped with an electric heater and a
temperature controller, so that cooling water, air-bone heating,
electric heating and heat carried by protective gases can be
monitored and controlled during operation, temperature in the pumps
can be maintained at some value for long term, some gaseous
substances are not converted into solid substances at normal
temperature and not deposited in the pumps, and requirements for
special process such of etching can be met.
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F |
DN200 ISO CF |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to
fields of semiconductor manufacturing, clip manufacturing,
industrial plating and scientific instruments, especially to
extraction of corrosive gases existing in etch, CVD, PVD and ion
implantation and gases easily coagulated at normal temperature.