KYKY TECHNOLOGY CO., LTD. |
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SEM , EM8000F Std FEG SEM , Reslutions 1.5nm@15KV ( SE )
EM8000 is the first Schottky scanning electron microscopy in China which been launched at 2014, it had received a number of positive comment from the market especially from University customer.
With the Muti-language operation system,integrated remote control panel with trackball,comprehensive after-sales service plan with lifelong technical support, it enjoys the good reputations among the customers.
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel,Focus ion beam remodel,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market.
EM8000 is the first Schottky scanning electron microscopy in China which been launched at 2014, it had received a number of positive comment from the market especially from University customer.
Advantages:
◆ Schottkyelectron gun,high brightness, good monochromaticity,small beam spot,long life duration
◆ Stable beam current,low energy spread
◆ Low Vacuum available
◆ Easy,convenient and friendly operation interface
◆ Two years no break down record
Specifications:
Item | KYKY-EM8000F Std FEG SEM | |
Resolution | 1.5nm@15KV(SE) 3nm@20KV(BSE) | |
Magnification | 15X ~ 800000X | |
Electron Gun | Schottky Field Emission Electron Gun | |
Accelerating Voatage | 0 ~ 30kV | |
Vacuum System | Ion Pump;Turbo Molecular Pump;Mechanical Pump | |
Detector | ◆ High vacuum secondary electron detector(with detector protection) | |
◆ Semiconductor four segmentation back scattering detector | ||
Specimen Stage | Five Axes Eucentric Motorized Stage | |
Travel | X | 0 ~ 80mm |
Range | Y | 0 ~ 50mm |
Z | 0 ~ 30mm | |
R | 360° | |
T | -5° ~ 70° | |
Max Specimen Diameter | 175mm | |
Accessories | X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine,Oversize Stage etc. | |
Modification | EBL;STM;AFM;Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator;SEM+Coating Machine;SEM+Laser |