The principle of Mass Flow Controller/gas mass flow meter/thermal
mass gas flow meter for gas like nitrogen, natural gas, argon,CO2
etc. is that a fluid flowing past a heated temperature sensor
removes a known quantity of heat as it passes.In a thermal
flowmeter, the fluid has to pass two temperature sensors.One sensor
obtains a reference value by measuring the actual process
temperature. The second sensor is a heating element and it receives
precisely as much energy as is needed to compensate for dispersed
heat and maintain a precisely defined temperature difference.The
higher the mass flow past the heated temperature sensor, the more
heat is dissipated and the more power has to be input to the
element to maintain the temperature difference.
Oxygen, nitrogen, hydrogen, chlorine and mixed gas blast furnace
gas, flue gas, biogas, compressed air, natural gas, liquefied gas,
primary and secondary air and etc.
