1. Vacuum Coating room: vertical single room, multi-room or horizontal single, multi-chamber structure

selection, 304 stainless steel material, the effective diameter of the vacuum chamber is 800mm- 3500mm,

with water cooling structure, etc.

2. Vacuum system: mechanical pump, rotary vane pump, roots pump, molecular pump, low temperature

pump, high vacuum oil diffusion pump with cold well, high vacuum oil diffusion pump, adopt stainless steel

pipe and valve.

3. Coating system: 2 sets of 2-10 sets of flat target or column target, DC magnetron sputtering, DC+RF

magnetron sputtering, HDAP coating.

4. Inflating system: 1-4 gas flow meter and flow indicator control.

5. Control system: touch screen, PLC, automatic and manual control can be converted at any time.Real-

time display detailed parameters, fully automatic control of the entire production process, automatic

storage process parameters.The main electrical components are famous brands such as schneider.

6. Safety system: setting up the sound and light alarm device of water, electricity and gas anomaly, and

implementing corresponding protection procedures.

7. Auxiliary pumping: a quick circulating low temperature water vapor trap.

8. Heating system: the temperature of the base plate can reach 350 degrees with the tube and other

heating elements.

9. Can be equipped with multiple target sources according to customer requirements.