Active Member
|
[China]
Address: No.618, West Kelin Road, Wenjiang District, Chengdu 610000, China
Contact name:Yuan Pan
Guotaivac Co., Ltd |
|
|
Customized Optical Dlc Coating Machine For IR Coatings
1. Product Description:
Diamond-like carbon film (DLC) is an amorphous film. Due to its high hardness and high elastic modulus, low friction coefficient, wear resistance and good vacuum tribological characteristics, it is very suitable as a wear-resistant coating, which causes The attention of the tribology community. At present, there are many methods for preparing DLC films. Different preparation methods use different carbon sources and ion energies that reach the surface of the substrate. The structure and properties of the deposited DLC films are very different, and the tribological properties are also different.
The Optical Coating Systems manufactured by Guotai are designed to maximize coating uniformity and production throughput, and have supported to a wide range of coating applications to include anti-reflection and highly reflective coatings, edge filters, beam splitters, optical filters, laser diodes, polarizers, gain flattening filters, and other complex non-quarter wave design including low stress and high laser damage threshold coatings.
2. Main Features:
The system can be carefully tailored to support client’s specific coating application and production requirements. Chamber sizes ranges from 400mm to 2700mm, which can be used as laboratory or mass production equipment. Configuration options include Thermal Evaporation, Electron Beam Evaporation, and Electron Beam Evaporation with Ion Assist; Substrate fixturing is available in single rotation, planetary, calotte, flip planetary, and unique arrangement for specific requirements; Support front side heating or back side heating, or both.
Guotai recognizes that user-friendliness and reliability of optical coating equipment is paramount to client’s success. The system incorporates proven design features based on decades of experience that produce exceptional results with easy to use software and dependable run to run consistency. We strive to continuously obtain customer feedback from coating engineers, operators, and maintenance personnel to improve design features that will minimize system downtime and increase overall productivity. Subsystem equipment of our systems are from reliable and brand manufacturers such as Baosi, Edwards, Inficon, Burkert, Omron to name a few. This allows our clients to benefit from the depths of Guotai and its vendors for the availability of service and spare parts.
The system includes optional process development, system calibration, film characterization and uniformity adjustment to less than 0.5%. They can be delivered with multiple, fully developed, production-ready coating processes, pre-programmed to minimize system downtime between production changeover's and to maximize run efficiencies and product yields. Calibration of the process is so consistent that new designs may be supplier to the operator from a remote site with the results from a test run analyzed and a small adjustment in calibration made before final production. Designed for run-to-run repeatability and to deliver excellent results after a minimum number of test coatings, the system lends itself to a fully automatic operation reducing time, manpower, and costs-even with high layer counts and complex layer stacks.
3. Model & Specifications:
| Items | Specifications | |||||||
| Model | ZZS-600 | ZZS-800 | ZZS-920 | ZZS-1100 | ZZS-1300 | ZZS-1550 | ZZS-2250 | ZZS-2700 |
| Size (mm) | Φ600xH750 | Φ800xH900 | Φ920xH1000 | Φ1100xH1300 | Φ1300xH1500 | Φ1550xH1600 | Φ2250xH1700 | Φ2700xH1850 |
| Structure | Vertical Chamber with Single Door, SUS304 Stainless Steel, Water Cooled | |||||||
| Wavelength Applied | 200nm~25000nm | |||||||
| Rotating Speed | 0~30 RPM (Adjustable) | |||||||
| Pumping Speed | Atmospheric Pressure to 1.5x10-3Pa, ≤20min | |||||||
| Ultimate Vacuum | 9.0x10-5Pa | |||||||
| Coating Material | H4, Ge, Au, Ag, Cu, Al, SiO, Ta2O5, TiO2, Ti3O5, ZrO2, ZnS, Al2O3, Nb2O5, SiO2, MgF2, YbF3, ZnZs, ZnSe | |||||||
| Substrate Fixturing | Single or Split Rotating Dome, Planetary, Calotte, Flip Planetary or unique arrangment for special requirement | |||||||
| Substrate Heating | Back Side or Front Side Heating, can achieve 350℃ Max. | |||||||
| Exhausting Unit | Rough Vacuum Pump + High Vacuum Pump + Polycold (up to the coating requirement) | |||||||
| Vacuum Controller | Vacuum Controller, Penning Gauge, Pirani Gauge | |||||||
| Deposition Sources | Thermal Evaporation, Electron Beam Evaporation, Electron Bean Evaporation with Ion Assist. (up to the coating requirement) | |||||||
| Air Charging Unit | MFC or APC | |||||||
| Thickness Controller | Quartz Crystal Controller | |||||||
| Control System | Automatic and Manual | |||||||
| Application | AR, UV/IR Cut Filter, AF, Enhanced Relfection Coating, Decorative Coating, Band Pass Filter, RGB Filter, Photocatalst, HR Coating, etc. | |||||||
| Remarks: 1.Final configuration subject to customer's requirement. 2.Customized features are supported. | ||||||||
4. About Us
Guotai is an ISO 9001& ISO14001 certified manufacturer of high-performance optical filters and thin-film coating systems. Registered in 2013, Guotai has rapidly grown from a small startup to a China-based leader in precision optical thin film systems. Guotai's engineering team has been instrumental in achieving this growth by refining our advanced E-Beam deposition process, designing and building our coating equipment, and dedicating a large amount of resources to research and development of optical coating process. By so far, Guotai has obtained more than 30 patents regarding the coating systems and a few of national and regional prizes.
Guotai Provides:
Design & Development & Manufacture : Vacuum Coating Machine
/ Mechanical Parts / Electrical Parts / Coating Process
Services: Equipment Installation / Maintenance / Repair / Technical
Support / Thin Film Production
