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ISO90001 RS232 Vacuum Helium Leak Detector Mass Spectrometer For Semiconductor Electronics Industry

Anhui Wanyi Science and Technology Co., Ltd.

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ISO90001 RS232 Vacuum Helium Leak Detector Mass Spectrometer For Semiconductor Electronics Industry

Country/Region china
City & Province hefei anhui
Categories Measuring & Analysing Instrument Processing Services
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Product Details

Vacuum Gas Leak Detection Helium Leak Detector Machine for Industrial Refrigeration

 

 

Introduction of Helium Leak Detector

 

SFJ-16M is a modular helium mass spectrometer leak detector with light modular structure design. It is suitable for low-pressure and high-pressure detection, which can be used for low-pressure detection in vacuum or local high-pressure detection by using sniffing line.

 

Product Parameters

 

SFJ-16M Helium Leak Detector

 

 

 

 

 

 

 

Performance Indicators






 

Minimum detectable leak rate
(Pa·m3/s)/ vacuum mode

Vacuum Mode (ULTRA):5.0×10-13 (helium pumping speed >5 l/s)
Vacuum mode (FINE):1.0×10-12 (helium pumping speed 2.5 L /s)

Minimum detectable leak rate
(Pa·m3/s)/ sniffer mode

5.0×10-8

Response time(s)

<1

Startup time(min)

≤95s

Leakage detection range
(Pa·m3/s)

5.0×10-13~1.0×10-3

Leakage rate display range
(Pa·m3/s)

1.0×10-13~1.0×10-3

Maximum allowable leak detection pressure(Pa)

1500

Detectable quality

2,3,4(H2 , He3, He4)

 

 

 

 

 

 

 

 

 

 

Basic Configuration










 

Man-machine interface

5 "color LCD Touch Screen

Ion source

2pcs, iridium coated yttrium oxide, automatic switching

I/O Input/output interface

Eight inputs and eight outputs

Communication interface

RS232/485,LAN

MES interface

Standard

Physical size of instrument
(W)×(D)×(H),mm

592 * 498 * 370mm

Specifications of leak detection port

DN16 KF/2pcs

Power Supply

DC24V

Operating temperature

0-40ºC

Power

240W

Display language

Both Chinese and English

Leakage rate display

Figure, bar chart, curve chart

 

 

Performance of Helium Leak Detector


1.. Realize the diversity of communication through various analog and digital interfaces;
2. Short starting time, fast signal response and clearing speed;
3. High reliable leak detection efficiency;
4. Intelligent fault prompt and alarm function.

 

 

Application of Helium Leak Detector

 

Electricity,

Refrigeration,

Lithium battery

 

 

 

 

 

 

Helium Mass Spectrometer Leak Detector

 

 

 

 

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