Xi'an Yunyi Instrument Co., Ltd |
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Description MF5000 series mass flow meters
MF5000 series mass flow meters are specially designed for small pipe flow monitoring and control. The series can measure gas flow in a pipe diameter as small as 3 mm,but not over 19 mm. With the self-flow conditioning feature of the MEMS sensor package, the meters feature an extremely low pressure loss compared to the traditional by-pass thermal mass flow meters in this application scope. The accuracy of the meters are generally ±(1.5+0.2FS)% or better depending on the requests. The meters can work at an environment of -20 to 60 C and pressure up to 1.5 MPa. Applications include semiconductor gas process monitoring and control, hospital oxygen gas monitoring, etc.
Specification MF5000 series mass flow meters
Accuracy: ±(1.5+0.5FS)%
Environment Temperature: -20 ~ +60 oC
Humidity: < 95 %RH (No icing or condensation)
Flow channel :3 ~ 19 mm
Display: Flowrate and accumulated flow
Interface:4 ~ 20 mA; RS485; Pulse
Calibration:Air @ 20 oC, 101.325 kPa
Protection: IP40 (Without Ex proof model); IP66 (With Ex proof model)
Ex PrOof: Ex d IIC T4
Detailed Images MF5000 series mass flow meters
Mechanical Dimensions MF5000 series mass flow meters
Model | DN (mm) | D (NPT-M) | L | H | H1 | W | d | c |
MF5003 | 3.0 | 1/8" | 118 | 144 | 28 | 38 | ![]() | 36 |
MF5006 | 6.0 | 1/4" | 124 | 144 | 28 | 38 | ![]() | 36 |
MF5008 | 8.0 | 3/8" | 124 | 151 | 35 | 38 | ![]() | 50 |
MF5012 | 12.0 | 1/2" | 150 | 156 | 40 | 40 | ![]() | 50 |
MF5019 | 19.0 | 3/4" | 182.5 | 156 | 40 | 40 | ![]() | 70 |
Features of MF5000 series mass flow meters
Highly sensitive, measuring as low as 8 mm/sec, and as high as 65
m/sec with a single assembly
Directly sense mass flow using thermal mass flow principle
Proprietary MEMS sensor package design for better reliability
Standard 12 ~ 24 Vdc power supply
Low pressure loss forreducing energy cost
Industrial standard Modbus protocol for easy networking and remote
control
Selection Guide of MF5000 series mass flow meters