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DC And MF Magnetron Sputtering Coating Machine Deep Black PVD Coating Solutions

SHANGHAI ROYAL TECHNOLOGY INC.

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DC And MF Magnetron Sputtering Coating Machine Deep Black PVD Coating Solutions

Country/Region china
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Product Details

   

DC and MF Magnetron Sputtering Coating Machine, Deep Black PVD Coating Solutions

 

 

Magnetron Sputtering Coating

 

Plasma coating
Magnetron sputtering is a plasma coating process whereby sputtering material is ejected due to bombardment of ions to the target surface. The vacuum chamber of the PVD coating machine is filled with an inert gas, such as argon. By applying a high voltage, a glow discharge is created, resulting in acceleration of ions to the target surface and a plasma coating. The argon-ions will eject sputtering materials from the target surface (sputtering), resulting in a sputtered coating layer on the products in front of the target.
Magnetron sputtering technology is characterized by:

  • A water-cooled target, so little radiation heat is generated
  • Almost any metallic target material can be sputtered without decomposition
  • Non-conductive materials can be sputtered by using radio frequency (RF)
    or medium frequency (MF) power
  • Oxide coatings can be sputtered (reactive sputtering)
  • Excellent layer uniformity
  • Very smooth sputtered coatings (no droplets)
  • Cathodes (of up to 2 meter long) can be put in any position, therefore high
    flexibility of sputtering equipment design
  •  
MODELRTAC1250-SPMF
TECHNOLOGYMF Magnetron Sputtering + Ion Plating
MATERIALStainless Steel (S304)
CHAMBER SIZEΦ1250 * H1250mm
CHAMBER TYPECylinder, vertical, 1-door
SPUTTERING SYSTEMExclusively design for thin black film deposition
DEPOSITION MATERIALAluminum, Silver, Copper, Chrome, Stainless Steel,
Nickel
DEPOSITION SOURCE2 sets MF Cylindrical Sputtering Targets + 8 Steered Cathodic Arc Sources + Ion Source For optional
GASMFC- 4 ways, Ar, N2, O2, C2H2
CONTROLPLC(Programmable Logic Controller) +
PUMP SYSTEMSV300B - 1 set (Leybold)
WAU1001 - 1 sets (Leybold)
D60T- 1 set (Leybold)
Turbo Molecular Pumps: 2* F-400/3500
PRE-TREATMENTBias power supply: 1*36 KW
SAFETY SYSTEMNumerous safety interlocks to protect operators
COOLINGCold Water
POWER ELECTRICAL480V/3 phases/60HZ ( USA compliant)
460V/3 phases/50HZ ( Asia compliant)
380V/3 phases/50HZ ( EU-CE compliant)
FOOTPRINTL3000*W3000*H2000mm
TOTAL WEIGHT7.0 T
FOOTPRINT( L*W*H) 5000*4000 *4000 MM
CYCLE TIME30~40 minutes (depending on substrate material,
substrate geometry and environmental conditions)
POWER MAX..155 KW
AVERAGE POWER
CONSUMPTION (APPROX.)
75 KW

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

 


 


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