Active Member
|
[China]
Address: CSCES strait screen and core intelligent manufacturing base，Shuangliu District，Chengdu City, Sichuan Province, P. R. China
Contact name:Tyra
ZEIT Group |
|
|
Magnetron Sputtering Deposition in Anti-discoloration Coating Field
Applications
| Applications | Specific Purpose | Material Type |
| Anti-discoloration coating | Precious metal anti-oxidation coating | Al2O3, TiO2 |
Working Principle
Electrons continuously collide with argon atoms in the motion
process,ionizing a large number of argon ions to
bombard the target. After multiple collisions, the energy of
electrons gradually decreases.Electrons break away
from the restriction of magnetic line of force, keep away from the
target, and finally deposit on the substrate.
Features
| Model | MSC-ADC-X—X |
| Coating type | Various dielectric films such as metal film, metal oxide and AIN |
| Coating temperature range | Normal temperature to 500℃ |
| Coating vacuum chamber size | 700mm*750mm*700mm (Customizable) |
| Background vacuum | < 5×10-7mbar |
| Coating thickness | ≥ 10nm |
| Thickness control precision | ≤ ±3% |
| Maximum coating size | ≥ 100mm (Customizable) |
| Film thickness uniformity | ≤ ±0.5% |
| Substrate carrier | With planetary rotation mechanism |
| Target material | 4×4 inches(compatible with 4 inches and below) |
| Power supply | The power supplies such as DC, pulse, RF, IF and bias are optional |
| Process gas | Ar, N2, O2 |
| Note: Customized production available. | |
Coating Sample
Process Steps
→ Place the substrate for coating into the vacuum chamber;
→ Roughly vacuumize;
→ Turn on molecular pump, vacuumize at top speed, then turn on the
revolution and rotation;
→ Heating the vacuum chamber until the temperature reaches the
target ;
→ Implement the constant temperature control;
→ Clean elements;
→ Revolve and back to the origin;
→ Coating film according to process requirements;
→ Lower temperature and stop the pump assembly after coating;
→ Stop working when the automatic operation is finished.
Our Advantages
We are manufacturer.
Mature process.
Reply within 24 working hours.
Our ISO Certification
Parts Of Our Patents
Parts Of Our Awards and Qualifications of R&D
