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Tungsten Sputtering Target For Magnetron Sputtering Coating
1. Description Of Tungsten Sputtering Target For Magnetron Sputtering Coating:
The tungsten layer is part of the thin-film transistors of TFT-LCD screens. They are used when large-screen formats, extremely high image clarity, and optimized contrast ratios are required. Tungsten targets are also used in the microelectronics industry, for example to form coatings in frequency filters (surface acoustic wave filters (SAW), bulk acoustic wave filters (BAW)). Other applications for tungsten targets include diffusion barriers made of tungsten nitride, conductor tracks in microelectronic components, and reactive sputtered transparent layers made of tungsten oxide for OLED displays and electrochemical applications.
In the magnetron sputtering process (PVD process), the sputtering target releases tiny metal particles that deposit on the material to be coated (ie the substrate), forming a thin film. This coating process is economical and fast, in which all materials must meet the strictest quality standards.
2. Size And Tolerance Of Tungsten Sputtering Target For Magnetron Sputtering Coating:
| Item Name | Tungsten Sputtering Target For Magnetron Sputtering Coating |
| Purity | 99.95% |
| Shape | Flat/rotary target, according to your request |
| Available size | Round: dia 25~300mm, Thickness:<20mm Rectangular: Length up to 1500mm Customization is available |
| Certificates | ISO9001:2008, SGS, The third test report |
| Technics | Hot isostatic pressing |
| Application | Widely used in coating processing industries A: Electronic and Semiconductor Application. B: Decoration and Coating Application. etc. |
Tungsten Sputtering target is produced with a standard anneal
Width Tolerance: +/-1/32”
Length Tolerance: +1/16”, -0”
Surface Finishes: Polished
Standard: ASTM B760
3. Chemical composition Of Tungsten Sputtering Target For Magnetron Sputtering Coating:
| Quality Standard (99.95% W) | |||
| Element | Value (<ppm) | Element | Value (<ppm) |
| Fe | 5 | Mo | 10 |
| Ni | 3 | P | 1 |
| Al | 2 | C | 5 |
| Si | 3 | O | 3 |
| Ca | 3 | N | 3 |
| Mg | 2 | ||
4. Application Of Tungsten Sputtering Target For Magnetron Sputtering Coating:
Tungsten sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memory, electronic control devices, etc.; they can also be used in the field of glass coating; they can also be used in wear-resistant materials, high temperature resistance Corrosion, high-end decorative products and other industries.
