Active Member
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[China]
Address: NO 21st ChuangXing Road, Shangsha community , Changan Town, Dongguan city Guangdong province, China
Contact name:Admin deng
Dongguan Ming Rui Ceramic Technology Co.,ltd |
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Advanced Ceramic Vacuum Suction Chuck / Ceramic Sucker for Wafer Picking Up
Key word: Ceramic Vacuum Chuck / Ceramic sucker
Ceramic Vacuum Chuck / Ceramic sucker is a special tool used in the process of semiconductor production for adsorption and load. It is applied to thinning, dicing and other processes. The sucker produced by our company can be matched with Japanese, German and domestic equipment, and has superior cost performance advantages.
Characteristics of Ceramic Vacuum Chuck / Ceramic sucker
It has excellent chemical stability and does not react with any substance;
Good flatness and parallelism;
It has the characteristics of uniform structure, high strength and durability;
The pores are uniform and the adsorption force is even;
Easy to change, short processing cycle;
It can be customized according to customer requirements.
Mingrui offers ultra-flat ceramic vacuum wafer chucks for improved yield management in semiconductor wafer processing. Low-surface-contact configurations reduce the risk of back-side particles, which have negative impact on wafer geometry in precision applications. The company offers:
Heat-resistant, non-damaging handling arms provide high functionality.
A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
Products : Ceramic Chucks and wafer end-effectors
Ceramic Vacuum Chuck / Ceramic sucker and end-effectors are used to manipulate and carry silicon wafers
through the whole production process. The chemical inertness of
ceramics allows those components to be contamination-free for the
wafer in particular in chemical wet etching baths.
These items enable the handling of large-size wafers and can be
designed with vacuum channels in order to hold the part.
Mingrui Ceramic can offer the following products :
Ceramic wafer suction plate play a key role on the wafer transfer equipment as automatic wafer unloader and wafer loader machinery .
LPCVD ceramic wafer vaccum suction plate are mainly used in the solar semiconductor thin film making , like the diffussion wafer load and unload machine . It used for wafer loading and unloading .
A heat-resistant, damageless handling arm. We can apply coatings such as Diamond Like Carbon (DLC) to the ceramic surface for enhanced functionality that mitigates damage to wafers / glass panels and prevents contamination from diffusing.
Mingrui Manufacture zirconia Ceramic wafer boat used on automatic wafer handling system diffusion furnace . As zirconia ceramic with the charactheristic of wear resistant , high temperature resistant,
ceramic wafer boat is a good choice for wafter carrier .
Integrated wafer loading& unloading, unloading the diffused wafers from the ceramic wafer boat
Technical Characteristics
·With continuous wafer loading& unloading can guarantee the continuous production. Or be used only for wafer loading or unloading is also available.
·With perfect detection and alarm system which guarantees the stable and automatic operation.
·With circulation method of the cassette baseplate which reduce the labor intensity.
·Modular control program structure, highly repeatable and readable, which is convenient for function expansion in future and maintenance;
·With recipe data design which enables the equipment to work with various kinds of ceramic wafer boat with different accuracy, while running equipment will follow the boat No. automatically and retrieve the corresponding recipe data without human intervention.
Alumina & Zirconia ceramic date sheet :
| Properties | Units | 95 Alumina | 99 Alumina | ZrO2 |
| Density | g / cm³ | 3.65 | 3.92 | 5.95-6.0g/cm³ |
| Water absorption | % | 0 | 0 | 0 |
| Coefficient of thermal expansion | 10-6/K | 7.9 | 8.5 | 10.5 |
| Modulus of Elasticity Young's Mod | GPa | 280 | 340 | 210 |
| Poisson's ratio | / | 0.21 | 0.22 | 0.3 |
| HV Hardness HV | MPa | 1400 | 1650 | 1300-1365 |
| Flexural Strength @ room temperature | MPa | 280 | 310 | 950 |
| Flexural Strength @700°C | MPa | 220 | 230 | 210 |
| Compressive Strength @ room temperature | MPa | 2000 | 2200 | 2000 |
| Fracture Toughness | MPa *m 1/2 | 3.8 | 4.2 | 10 |
| Heat conductivity @ room temperature | W/ m*k | 18-25 | 26-30 | 2-2.2 |
| Electrical Resistivity @ room temperature | Ω*mm2 /m | >1015 | >1016 | >1015 |
| Max use temperature | °C | 1500 | 1750 | 1050 |
| Resistance to acid alkaline | / | high | high | high |
| Dielectric Constant | / | 9.5 | 9.8 | 26 |
| Dielectric Strength | KV/mm | 16 | 22 | / |
| Thermol Shock Resistance | △ T ( °C ) | 220 | 180-200 | 280-350 |
| Tensile Strength @ 25 °C | MPa | 200 | 248 | 252 |
To see how we can assist you with your semiconductor industry , contact us today.
Industrial Ceramic Intriduction
Aluminium Oxide, Al2O3 is the most widely applied and cost
effective technical ceramic material. It offers a combination of
superior mechanical strength and electrical properties, wear
resistance and corrosion resistance. The maximum working
temperature is up to 1700 °C with relatively high thermal
conductivity. It is also an electrically insulating material with a
high electrical resistivity. The good corrosion resistance makes it
insoluble in water and slightly soluble in strong acid and alkaline
solution.
Company Introduction
Mingrui ceramic manufacture and provides alumina ceramic components
for a wide range of application like Mechanical Equipment,
Electronic & Electrical, Oil Drilling, Medical, Chemical
Industry etc. According to actual application and customer's
requirement, the purities vary from 95%-99.7% and the forming
methods will be different. The forming methods applied in our plant
include dry pressing, isostatic pressing, injection moulding,
extrusion moulding. With experienced engineers and talented
workers, we are confident to offer high quality, high precision,
complex components for customers worldwide.
Mingrui Ceramics has years of experience designing and developing technical ceramic solutions for a wide variety of applications and industries. High Temperature Refractory Machining Ceramic Parts Laser Equipment. We offer this expertise to all of our customers to ensure the best design and materials are chosen for their specific application and needs. High Temperature Refractory Machining Ceramic Parts Laser Equipment, Typically, our custom technical ceramic components and parts we supply are used for one of three main reasons:
FAQ
Q: Are you trading company or manufacturer ?
A: We are factory.
Q: How long is your delivery time?
A: Generally it is 5-10 days if the goods are in stock. or it is 15-20 days if the goods are not in stock, it is according to quantity.
Q: Do you provide samples ? is it free or extra ?
A: Yes, we could offer the sample for free charge but do not pay the cost of freight.
Q: What is your terms of payment ?
A: Payment<=1000USD, 100% in advance. Payment>=1000USD, 30% T/T in advance ,balance before shippment.
If you have any other question, pls feel free to contact us .
