Active Member
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[China]
Address: No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Contact name:Wang He
KYKY TECHNOLOGY CO., LTD. |
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As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market
Advanteges:
◆ Optional low vacuum modules(LVSE,LVBSE)
◆ Rich automation functions
◆ Column/Chamber/Electric System Customization
◆ Optional Big size chamber
◆ Wide field navigation camera
◆ Rich expanding attachments
Specifications:
| Item | EM6910 Tungsten Filament SEM | |
| Resolution | SE:3nm@30KV,8nm@3kV； BSE :4nm@30KV | |
| Magnification | 1x-450000x | |
| Electron Gun | Pre-aligned tungsten filament | |
| Accelerating Voltage | 0.2kV-30kV | |
Vacuum system | Turbo Molecular pump +mechanical pump | |
| Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
| Specimen Stage | Five axes stage | |
| Travel | X(Auto) | 0 ~ 80mm |
| Range | Y(Auto) | 0 ~ 50mm |
| Z(Manual) | 0 ~ 30mm | |
| R(Manual) | 360° | |
| T(Manual) | -5° ~ 70° | |
| Max Specimen Diameter | 175mm | |
| Detector | Secondary electron detector | |
Semiconductor BSE detector※ | ||
Infrared CCD | ||
| Low-vacuum SED※/ Low-vacuum BSED ※ | ||
| Modification | Stage Upgrade;EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage ; Micro-nano manipulator; SEM+Coating Machine;SEM+Laser | |
| Accessories | LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
Low vacuum function※ | Vacuum level 10-270Pa SE:4nm@30kv,50Pa | |
