5322 358 10173 | Belt R-Axis Motor drive |
5322 358 10174 | Belt, R-Axis Spline |
9965 000 09055 | Belt, head |
5322 358 10276 | Belt |
9965 000 10373 | Pulley |
5322 528 81507 | Pulley Conveyor |
5322 358 31283 | Belt |
| |
5322 360 10323 | Piston Assy (Piston cylinder only for HEAD 1) |
5322 360 10206 | Piston, Head Up Down Assembly Heads 1-8 |
5322 360 10481 | Piston, Assembly Spline up down |
5322 462 10762 | Plug 2, assy (lower plug contains items 4,5,11) |
5322 462 11201 | Plug assy (plug assy 1-3-5-7) |
9965 000 03801 | Plug assy (plug assy 2-4-6-8) |
| |
| |
| |
| |
5322 532 12547 | Seal is located on the lower part of the piston shaft |
5322 532 12545 | Chevron seal used in Piston upper and lower plugs. Packing, |
5322 532 12546 | Chevron seal used in Piston assembly Packing |
5322 532 13169 | Packing |
5322 530 51347 | Packing, |
| |
| |
| |
5322 530 10289 | O-ring, plugs |
5322 530 51297 | O-ring, metal caps |
5322 530 10474 | O-ring, plastic caps |
5322 530 10292 | O-ring, inlets |
5322 530 10442 | O-ring |
5322 530 10441 | O-ring |
| |
| |
5322 502 60165 | Screw (M2x3) leaf spring |
5322 492 71713 | Leaf spring |
5322 492 11793 | Leaf spring |
5322 360 20081 | Filter |
5322 360 20106 | MUFFLER |
5322 530 70461 | Circlip, shaft |
5322 530 70526 | CIRCLIP |
| |
| |
5322 360 10207 | Valve speed select |
9965 000 03808 | Valve, speed select |
5322 360 10208 | Valve up/down |
9965 000 03807 | Valve, up-down select |
5322 693 11367 | Single ejector |
9965 000 09042 | Ejector, Single |
5322 360 10209 | Valve blow-off |
5322 281 20202 | Single valve |
| |
5322 216 04084 | Vacuum sensor board |
5322 216 04673 | Vacuum sensor board |
5322 132 00141 | Sensor, head down sensing |
9965 000 10927 | Sensor, head down sensing |
5322 132 00036 | Sensor Head |
5322 132 00132 | Sensor W origin |
5322 132 00056 | Sensor 1-3 (L=1150) |
9965 000 06136 | Sensor 1-3 (L=1400) |
5322 130 10079 | Sensor Presure |
| |
5322 693 11352 | Spline assy (Complete spline shaft assy head 1) |
5322 693 11199 | Spline assy (Complete spline shaft heads 2-8, indicated with “Y”
means 40 um accuracy) |
5322 693 11539 | Topaz Inner spline shaft heads 2-8 |
5322 693 11542 | Inner Spline, 16 micron |
| |
5322 535 10674 | Shaft head asyy (shaft head assy head 1-3-5-7 for SF and FNC head) |
9965 000 03802 | SHAFT NOZZLE HEAD |
5322 535 10676 | Shaft head assy (spline shaft assy 2-4-6-8 only for FNC head) |
| |
9965 000 10930 | Spline Shaft, Even Heads, FNC |
9965 000 10928 | Spline Shaft, even Heads SF |
9965 000 10929 | Spline Shaft, Odd Heads SF and FNC |
| |
9965 000 10928 | Spline Shaft, even Heads SF |
9965 000 10929 | Spline Shaft, Odd Heads SF and FNC |
| |
| |
| |
5322 216 04674 | I/O Board for Topaz Xii (BD CNV) |
9965 000 11067 | I/O Core Board for Topaz Xii (BD) |
| |
5322 360 10483 | Nozzle assy (nozzle assy heads 2-4-6-8) |
| |
| |
5322 360 40523 | Cylinder Main Stopper |
5322 535 92541 | Speed Controller |
5322 360 40471 | Cylinder sub stopper |
5322 360 10205 | Cylinder up/down |
5322 526 40896 | Joint |