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SILICON CARBIDE (SIC) TRAYS OR PLATE, AS A WAFER HOLDER FOR ICP ETCHING PROCESS IN LED INDUSTRY

HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD

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SILICON CARBIDE (SIC) TRAYS OR PLATE, AS A WAFER HOLDER FOR ICP ETCHING PROCESS IN LED INDUSTRY

Country/Region china
City & Province zhengzhou henan
Categories Refractory
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Product Details

 

Silicon Carbide (SiC) Trays or Plate

 

Silicon Carbide (SiC) Trays or plate used as a wafer holder for ICP etching process in LED industry.

Silicon carbide (SiC) is a has excellent thermal conductivity, corrosion resistance, and with low thermal expansion. Silicon carbide is an excellent material for sealing rings and bearings. Silicon carbide trays have excellent corrosion resistance, great wear resistance, great mechanical strength under high temperatures. We supply many sizes of silicon carbide trays as well as other SiC products.
 

Silicon Carbide Trays Properties
 

Compound FormulaSiC
Molecular Weight40.1
AppearanceBlack
Melting Point2,730° C (4,946° F) (decomposes)
Density3.0 to 3.2 g/cm3
Electrical Resistivity1 to 4 10x Ω-m
Poisson’s Ratio0.15 to 0.21
Specific Heat670 to 1180 J/kg-K


Silicon Carbide Tray Specifications
 

TypeRecrystallized SiCSintered SiCReaction Bonded SiC
Purity of Silicon Carbide99.5%98%>88%
Max. Working Temp. (`C)165015501300
Bulk Density (g/cm3)2.73.1>3
Appearance Porosity<15%2.50.1
Flexural strength (MPa)110400380
Compressive strength (MPa)>30022002100
Thermal expansion (10^-6/`C)4.6 (1200`C)4.0 (<500`C)4.4 (<500`C)
Thermal conductivity (W/m.K)35~3611065
Main characteristicsHigh temp. High resistance.
High purity
Fracture ToughnessChemical Resistance


Feature requirement:

  1. Excellent thermal conductivity
  2. Resistant to plasma shock
  3. Good temperature uniformity


Silicon Carbide Tray Applications

-Silicon carbide can be applied in areas such as semiconductor and coating.
-Our silicon carbide trays are widely used in LED industry.

Packing of Silicon Carbide

Our Silicon Carbide Trays are carefully handled to minimize damage during storage and transportation and to preserve the quality of our products in their original condition.


 
 

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