WF6 refers to tungsten hexafluoride, which is a chemical compound
composed of one tungsten atom bonded to six fluorine atoms. Here
are some key points about WF6:
- Chemical Formula: WF6
- Molecular Weight: 297.84 g/mol
- Structure: WF6 has an octahedral molecular geometry, with the
tungsten atom at the center and six fluorine atoms arranged around
it.
- Physical Properties: Tungsten hexafluoride is a yellowish-green,
volatile, and corrosive liquid at room temperature. It has a strong
odor and can form white fumes when exposed to air due to its
reaction with moisture.
- Uses: WF6 is primarily used in the semiconductor industry for
chemical vapor deposition (CVD) processes. It is employed as a
precursor in the formation of thin films of tungsten, which are
used as conductive and barrier layers in integrated circuits and
other electronic components.
- Reactivity: Tungsten hexafluoride is highly reactive and reacts
readily with water, moisture, and many other compounds. It
hydrolyzes in the presence of water to form tungstic acid and
hydrofluoric acid, which are corrosive substances.
- Safety Considerations: WF6 is highly toxic and corrosive. It can
cause severe burns and eye damage upon contact with the skin or
eyes. Inhalation of its vapors or fumes can lead to respiratory
irritation and lung damage. Proper safety measures, including the
use of appropriate protective equipment and ventilation, should be
followed when handling and working with WF6.
- Storage and Handling: WF6 is typically stored and transported in
cylinders or containers made of materials resistant to its
corrosive properties, such as stainless steel. Special care should
be taken to prevent exposure to moisture, as it can react with
water or humidity in the air.
- Environmental Impact: WF6 is not considered a significant
greenhouse gas or ozone-depleting substance. However, its handling
and disposal should be performed in accordance with local
regulations and best practices to minimize environmental impact.
Product Spec:Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product: | Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Detailed Photos
Company Profile
Shanghai Kemike Chemical Co., Ltd is staffed by trained
personnel, combine many years experience in Gas industry .We supply
cylinder gas, electronic gas, etc ., and the gas holder, panel,
valves and fittings and other equipment, parts and engineering
services to our customers in China and worldwide; The products are
involved in various industrial fields, such as semiconductor chip,
solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine ,
etc., Our mission is to partner with our global customers to
provide support, solutions and quality products that are
innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane,
acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3,
SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3,
B2H6) and other electronic gases.
