Product Spec:Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade
The COA of Product: Test items | Units | Quality requirements | Test results |
CF4 | ppm | <0.5 | <0.01 |
O2 | ppm | <0.5 | <0.01 |
N2 | ppm | <1 | 0.03 |
CO | ppm | <0.5 | <0.02 |
CO2 | ppm | <0.5 | <0.01 |
SiF4 | ppm | <0.5 | <0.1 |
SF6 | ppm | <0.5 | <0.1 |
HF | ppm | <5 | 0.19 |
Al | ppb | ≤10 | <0.020 |
As | ppb | ≤10 | <0.001 |
B | ppb | ≤10 | <0.005 |
Ca | ppb | ≤5 | <0.200 |
Cd | ppb | ≤2 | <0.001 |
Cr | ppb | ≤10 | <0.020 |
Fe | ppb | ≤10 | <0.007 |
K | ppb | ≤5 | <0.100 |
Mn | ppb | ≤10 | <0.001 |
Na | ppb | ≤5 | <0.040 |
Th | ppb | ≤0.1 | <0.001 |
Ti | ppb | ≤10 | <0.002 |
Li | ppb | ≤10 | <0.002 |
U | ppb | ≤0.05 | <0.001 |
Zn | ppb | ≤10 | <0.005 |
Si | ppb | ≤10 | <0.100 |
Pb | ppb | ≤10 | <0.001 |
P | ppb | ≤2 | <0.300 |
Mg | ppb | ≤10 | <0.020 |
Ni | ppb | ≤20 | <0.030 |
Cu | ppb | ≤5 | <0.005 |
Mo | ppb | ≤10 | <0.001 |
Total impurities of other metal | ppb | ≤500 | <0.0010 |
Detailed Photos
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Company Profile
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Shanghai Kemike Chemical Co., Ltd is staffed by trained
personnel, combine many years experience in Gas industry .We supply
cylinder gas, electronic gas, etc ., and the gas holder, panel,
valves and fittings and other equipment, parts and engineering
services to our customers in China and worldwide; The products are
involved in various industrial fields, such as semiconductor chip,
solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine ,
etc., Our mission is to partner with our global customers to
provide support, solutions and quality products that are
innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane,
acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3,
SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3,
B2H6) and other electronic gases.
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