WUHAN XIEYUAN AUTOMATION EQUIPMENT CO.,LTD |
|
A proprietary new thin-film deposition technology was used in the zirconia sensor that creates a molecular bond between the zirconia element and the platinum layer. This prevents separation, enables a reduction in sensor size and ensures a high-speed response and long life.
The OX400 can be used to control and monitor various semiconductor applications, and to control environment, air leakage into inert gas, and other processes.
OX400 SPECIFICATION | |
Measurement object | Oxygen concentrations in inert gases containing no flammable gas,
silica, corrosive gas, or liquid (including water vapor) |
Measurement system | Zirconia system |
Sampling method | Pump, aspirator, or no suction device |