Active Member
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[China]
Address: taicheng raod baoji city shaanxi china
Contact name:tony lee
Baoji Fitow Metal Co.,Ltd |
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T
Tantalum Target
Standard: GB/3629-2006
Brand: RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Purity: ≥99.95%
Form: Annealing or hard
Specification: φ(40-50)mm*T(3-28)mm
Recrystallization:≥95%
Grain size:≥40μm
surface roughness:≤Ra 0.4
Flatness: ≤ 0.1mm
Diameter tolerance:±0.254mm
Special requirements can be discussed between the parties.
Special requirements can be discussed between the parties.
Tantalum target is a very important material in thin film
technology. We can make tantalum target with purity being above
99.95%, small grain size, and good consistent state of recrystal
microstructure and three axial positions. In this way, the
oxidation film sputtered from cathodic tantalum sputtering target
is even and resistant to other chemicals. Tantalum sputtering
target has been widely used in fiber optics, semiconductor chip,
integrated circuit and military areas.
ntalum target, Tantalum sputtering targets, Tantalum- tungsten Alloy targets
Material:RO5200, RO5400, RO5252(Ta-2.5W), RO5255(Ta-10W)
Size: circular targets:Diameter 15mm up to 400mm x Thickness 3mm
up to 28mm
rectangular targets:Thickness 1mm up to 40mm x Width up to 1000mm x
Length up to 3000mm
Table 1: technology parameter
| Grade | 3N, 3N5, 4N, with Ta 99.99％min |
| Recrystallization | 95％min |
| Grain size | ASTM 4 or finer |
| Surface finish | 16Rms max. or Ra 0.4 ( RMS64 or better) |
| Flatness | 0.1mm or 0.15％ max |
| Tolerance | +/-0.010" on all dimensions |
| Grade | Tensile strength δbpsi (MPa), ≥ | Yield strength δ0.2, psi (MPa),≥ | Elongation in 1"/2" gage length, ％, ≥ |
| RO5200/RO5400 | 30000 (207) | 20000 (138) | 25 |
| RO5252 | 40000 (276) | 28000 (193) | 20 |
| RO5255 | 70000 (481) | 60000 (414) | 15 |
| RO5240 | 40000 (276) | 28000 (193) | 20 |
| Special requirements to be agreed on by the supplier and buyer of negotiation | |||
Chemical composition:
| Grade | Element content (wt%) | |||||||||||
| C | N | O | H | Fe | Si | Ni | Ti | Mo | W | Nb | Ta | |
| Ta1 | 0.01 | 0.005 | 0.015 | 0.0015 | 0.005 | 0.005 | 0.002 | 0.002 | 0.01 | 0.01 | 0.05 | reninder |
| Ta2 | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.02 | 0.005 | 0.005 | 0.03 | 0.04 | 0.1 | reninder |
| TaNb3 | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.03 | 0.005 | 0.005 | 0.03 | 0.04 | 1.5~3.5 | reninder |
| TaNb20 | 0.02 | 0.025 | 0.03 | 0.005 | 0.03 | 0.03 | 0.005 | 0.005 | 0.02 | 0.04 | 17~23 | reninder |
| TaNb40 | 0.01 | 0.01 | 0.02 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 0.05 | 35~42 | reninder |
| TaW2.5 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 2.0~3.5 | 0.5 | reninder |
| TaW7.5 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 6.5~8.5 | 0.5 | reninder |
| TaW10 | 0.01 | 0.01 | 0.015 | 0.0015 | 0.01 | 0.005 | 0.01 | 0.01 | 0.02 | 9.0~11 | 0.1 | reninder |
Table3. Mechanical requirements (annealed condition)
