UGA Series Atmospheric Pressure Gas Analyzers
UGA series — ideal for corrosive gases
UGA-Hydrogen series (UGA w/opt. 3) — ideal for high concentration of H2
ULT series — low cost solution (starting at $28,000)
The UGA and ULT Series Universal Gas Analyzers are state-of-the-art bench top mass
spectrometers that operate from above atmospheric pressure to UHV.
They are ideal for on-line monitoring and analysis of gas mixtures.
Whether you’re measuring trace-level contaminants, solvents,
hydrocarbons, refrigerants or corrosive gases, your Universal Gas
analyzer is up to the task.
UGA applications include semiconductor exhaust gas monitoring,
glove box analysis, fuel cell studies, Freon detection, pollution
monitoring, fermentation studies and general R&D vacuum
These analyzers are also simple to operate and maintain. The
chassis design allows the instrument to be operated vertically or
horizontally, and both front-panel and computer operation are
supported. The ULT series is a simplified design for less demanding applications.
Principle of operation
The UGA system uses a two-stage pressure reducing inlet to sample
gases at atmospheric pressure. After the pressure is reduced to
around 10-6 Torr, the gas stream is sent to a mass spectrometer
(residual gas analyzer - RGA) which measures the concentration of
each mass of interest.
The UGA Windows software provides a graphical user interface for
complex graphing and data analysis. The software also allows remote
control of the system’s valves, heaters and pumps.
For gas sampling in the range of 10-1 to 10-4 Torr, the vacuum
inlet assembly is used. Simply attach a
2CF totube adapter to one of the CF ports, and adjust the length of
the tube for the inlet pressure.
Direct access to the RGA is provided for UHV applications (<10-4
Torr). Any of the 2CF ports of the vacuum inlet assembly can be
used to connect to your vacuum chamber.
Multi-capillary inlet (UGA series only)
for UGA applications
An optional multi-port sampling inlet consists of 16
manifold-mounted valves that can be used with a variety of
Heated chamber (UGA series only)
The UGA system is equipped with individual heaters for the vacuum
chamber (including RGA), the turbo pump connector, and the vacuum
inlet assembly. During bakeout, the system can be heated to 120 °C.
Dual-diaphragm pumps (UGA series only)
Separate diaphragm pumps are used to handle the bypass flow and
backing of the turbo pump. This architecture allows corrosive gases
(chlorine, fluorine, etc.) to be analyzed without damaging the RGA
and turbo pump, and virtually eliminates the problem of back
streaming. Measuring high concentrations of low mass gases
(hydrogen, helium, etc.) is no longer a problem.
Turbo pump venting (UGA and ULT)
An optional valve and inlet to the turbo pump’s exhaust is
available for users who wish to vent with dry nitrogen (or other
inert gases). This keeps the pump free from water and other
contaminants present in air.
Using your Universal Gas Analyzer
The UGA system can be controlled from the front-panel or from a
computer. A choice of manual or auto-control of all system
components is provided.
Data is measured and displayed using the UGA software. The
intuitive user interface allows measurements to be made quickly and
easily. Data is captured and displayed in real-time, or scheduled
for acquisition at a specified time.
Features include analog and histogram scan modes, pressure vs. time
plots, leak detection, gas library, and on-line help.
RGA parameters can also be controlled and monitored through a
high-level ASCII command set. Standard RS-232 and Ethernet
interfaces are used as the data link to your PC.
The UGA Analyzers offer the best value of any system currently
available. They provide more performance, better features, and are
priced well below the competition.
Phone: (408)744-9040 Fax: (408)744-9049 email: info@thinkSRS.com