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UHV Ultra Hight Vacuum Metallizing System, High Vacuum Ion Plating Equipment

SHANGHAI ROYAL TECHNOLOGY INC.

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Address: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613

Contact name:ZHOU XIN

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UHV Ultra Hight Vacuum Metallizing System, High Vacuum Ion Plating Equipment

Country/Region china
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Product Details

Electrostatic Metallic Chrome Gold Color PVD Plating Equipment / Casting Alloy Piping and Plumbings Chroming Machineand voltage or bombardment of inert gas to ionize a target material ( which can be a pure metal or an alloy). Once the target material is ionized into a vapor form it is the deposited on the part surface. There are several three popular types of PVD coatings: Vacuum Evaporation and Sputtering, and Arc Vapor Deposition ( or Cathodic Arc)

 

Sputter Deposition

Sputtering is a metal deposition process where the target material is not vaporized using heat, but its metal atoms are physically dislodged from the target by the collision of a bombarding particle. The distance from the target to the part in a sputtering chamber is much shorter than in vacuum deposition. Sputtering is also done under much higher vacuum. The sputtering source itself can be made of elements, alloys, mixtures, or compounds. This form of metal deposition is commonly used in semiconductor manufacturing, on architectural glass, reflective coatings, compact discs CDs, and decorative coatings. 

 

Arc Vapor Deposition

Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode target. The vaporized material then condenses on a substrate, forming a thin film. The technique can be used to deposit metallic, ceramic, and composite films. The arc evaporation process begins with the striking of a high current, low voltage arc on the surface of a cathode ( known as the target) that gives rise to a small (usually a few micrometers wide), highly energetic emitting area known as a cathode spot. The localized temperature at the cathode spot is extremely high ( around 15000℃), which results in a high evlocity (10km/sec) jet of vaporized cathode material, leaving a crater behind on the cathode surface.

 

Royal technology designed and fabricated the RTAC-SP series PVD vacuum metallizing equipment are 

popular used  for metal alloys, brass, Zamak ( Zinc alloy) , plastic, electronics,  piping and plumbings, plumber fittings, watering system valves and caps; medical and industrial valves etc. The process purpose is mainly to replace the Chromium Electroplating which is hazardous for human and environment. 

 

 

The High Vacuum Metallizing System Configurations and Features:

 

ModelRTAC1008-SPMFRTAC1250-SPMFRTAC1615-SPMF
Effective Chamber SizeΦ1000 x H800mmΦ1250 x H1250mmΦ1600 x H1500mm
Deposition Sources

Cylinder Arc (steered circular arc for option) +MF Sputtering Cathode +

Linear Ion Source

Vacuum Pumping System ( Leybold Pumps + Turbo Molecular Pump)

 

SV300B - 1 set (300m³/hr)SV300B - 1 set (300m³/hr)SV300B - 2 set (300m³/hr)
 

WAU1001-1set

(1000m³/hr)

WAU1001-1set

(1000m³/hr)

WAU2001-1set

(1000m³/hr)

 D60T- 1 set (60m³/hr)D60T- 1 set (60m³/hr)D60T- 1 set (60m³/hr)
 

Turbo Molecular Pumps:

2 sets (3500L/S)

Turbo Molecular Pumps:

2 sets (3500L/S)

Turbo Molecular Pumps:

3 sets (3500L/S)

Sputtering Power Supply1*24KW (MF)2*36KW(MF)3*36KW(MF)
Arc Power Supply6*5KW7*5KW8*5KW
Bias Power Supply1*24KW1*36KW1*36KW
Planetary Rods6/812/1620
Heaters6*2.5KW8*2.5KW9*2.5KW
Ultimate Vacuum9.0*10-4Pa (empty, clean,room temperature)9.0*10-4Pa (empty, clean,room temperature)9.0*10-4Pa (empty, clean,room temperature)
Cycle Time (depends on pump)40’~50’ depends on substrate material and coating recipes
Working Power Requirement3Phase 4 lines,AC380V,50HZ,35KW3Phase 4 lines,AC380V,50HZ,120KW3Phase 4 lines,AC380V,50HZ,150KW
Cooling WaterYES, industrial water chiller
Processing Gas (99.99%)4 ways4 ways4 ways
Footprint (mm)2000*2000*23004000*4500*32005500*5000*3600
Total Weight(KGS)450070009000
Total Power Consumption(Approx.)50KW110KW170KW
Actual Power Consumption(Approx.)30KW60KW80KW

 

Above technical parameters only for reference, Royaltec reserves the right for final production based on specified applications.

 

Please consult us with your expected solutions you want to get from Royaltec, we provide the turn-key coating solutions on this application.

 

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