Home Companies SHANGHAI ROYAL TECHENOLOGY INC.

Aluminum Oxide Copper PVD Plating Machine, PVD Copper Plating on Ceramic Sheets, Copper Deposition System

Contact Us

[China]

Trade Verify

Address: 819# SONGWEI ROAD (N.) SONGJIANG INDUSTRIAL ZONE, SHANG HAI, CHINA 201613

Contact name:

SHANGHAI ROYAL TECHENOLOGY INC.

Verified Suppliers
  • Trust
    Seal
  • Verified
    Supplier
  • Credit
    Check
  • Capability
    Assessment

Aluminum Oxide Copper PVD Plating Machine, PVD Copper Plating on Ceramic Sheets, Copper Deposition System

Country/Region china

Product Details

                     Aluminum Oxide Copper Plating Machine, PVD Copper Plating on Ceramic Sheets,  

 

Keywords: Direct Plated Copper, DPC, Ceramic Copper Plating, PVD Hard Coatings, PECVD process, DLC film, Diamond Like Carbon Film, Sputtering Optical film, Gencoa Magnetron Sputtering Cathode, Ion Source, PA PVD

 

 

RTAC950-SP Design Features:

  • Flexibility: arc and sputter sources, linear ion source devices mounting flanges are standardized for flexible exchange
  • Versatility: available for deposit variety of base metals and alloys, optical coatings and hard coatings, soft coatings. Compound films and solid lubricating films on the metallic and non-metallic materials substrates
  • Straight forward design: 2-door structure, front and back opening for easy maintenance

 

 

Technical Specifications

  • Performance

1. Ultimate Vacuum Pressure: better than 8.0*10-4 Pa;

  • Base Vacuum pressure: 3.0*10-2 Pa

3. Pumping down Time: from atm to 1.0×10-3 Pa≤15 minutes ( room temperature, dry, clean and empty chamber)

4. Deposition source: Gencoa magnetron sputtering cathodes, steered arc cathodes, Ion source

5. Operating Model: Full Automatically /Semi-Auto/ Manually

6. Heating: from room temperature up to max. 500℃,

9. Ion source for PECVD and PA PVD process.

  • Structure

The vacuum coating machine contains key completed system listed below:

 

1. Vacuum Chamber
1.1 Size: Inner Depth 950mm

Inner Height:1350mm

1.2 Material: Vacuum Chamber SUS304

Door and flanges SUS304

Chamber strengthen structure: SS41 mild steel, with painted finishing surface treatment.

Chamber chassis SS41 mild steel with painted finishing surface treatment.

1.3 Chamber Shield : SUS304

1.4 View Window: on chamber doors -2

1.5 Vacuum Chamber Venting Valve (including silencer)

1.6 Door: 2 sets, front and back, SUS304 material

 

2. Roughing Vacuum Pumping System:
Oil rotary vane vacuum pump + Holding Pump

 

3. High Vacuum Pumping System:

Turbo Molecular Pump - 2 sets

 

4. Electrical Control and Operation System- PLC+ Touch ScreenOperation System:

Suppliers:

PLC: Mitsubishi, Model:FX-IN60MR-001 SERIES

Electronic Components: SCHNEIDER,OMRON.

Safety Protecting System: Numerous safety interlocks to protect operators and equipment ( water, current gas, temperature etc.)

Coating Processes System: Process Automation & Control. Automatically saved in memory for 3 months. Featured coating recipes data: target operation current/voltage, Mass Flow, Vacuum pressure, temperature, coating times are saved for an analysis to enhance the coatings quality.

4.1 Main circuit: None-fuse breaker switch, electromagnetic switch, C/T in series type

4.2 Power Supply: MF sputtering power + DC Arc power + Bias Power Supply

4.3 Deposition control system

4.4 Operation System: Touch Screen + PLC, recipe control and data logging, Auto shutdown, auto evacuation, auto coating

4.5 Measuring System

Vacuum Pressure : Vacuum Gauge: Pirani + Penning gauge + Full range vacuum gauge -- Europe brand

Temperature measuring device: Thermocouple
MFC: Mass Flow Controller ( 4 ways ),

4.6 Alarm System: Compressed air pressure , Cooling water flow, Mis-operation

4.7 Power Load Indicator: Voltage indicator and load current indicator

 

5. Deposition System

5.1 Deposition source: Sputtering cathodes+ Arc sources + Ion Source

5.2 Deposition material: ITO, Titanium, Chrome, Aluminum, Stainless Steel, TiAl etc.

 

6. Sub-System

6.1 Air Compressed Valve Control System

6.2 Cooling Water System:Water flow pipe and switch valve system

 

7. Working Environment

Compressed Air: 5~8kg/cm2

Cooling Water: Water-In Temperature: 20~25℃, 200 Liter/min,
Water-In Pressure: 2~3 kg/cm2,

 

Power: 3 Phase 380V 50Hz(60Hz), 130kVA, average power consumption: 60KW

Installation Area: (L*W*H)4400*3200*2950mm

Exhaust: Vent for mechanical pumps

 

Applications

 

 

 

 

 

Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.

 

Hot Products

Logos And Signs Vacuum Metalizing Machine , Vacuum Plating Equipment Logos and Signs Vacuum ...
Silver spoon Aluminum PVD Metallizing Equipment, Cutlery Aluminum Deposition Plant, Plastic ABS ...
Stainless Steel PVD Vacuum Coating Machine, MF Sputtering high uniformity films deposition Coating ...
Plastic Vacuum metallizing Machine / Thermal Evaporation Vacuum Coating Machine /Plastic products ...
Automotive Chrome Mirros Sputtering Machine, Turnkey Car Mirrors Manufacturing Machines, Automotive ...
Steel frame construction building materials Ion Plating System , Muil Arc Thin Film Coating Machine ...