Active Member
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[China]
Address: No. 13 Zhongguancun Bei er tiao, Haidian District, Beijing,100190
Contact name:Wang Chao
KYKY TECHNOLOGY CO., LTD. |
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SEM , EM6900 Std , tungsten filament , SE+BSE , Resolution 3nm@30KV(SE)
As KYKY over 60 years SEM manufacture experience, the whole EM series supports old system refurbished and customized system as SEM+, such as Electron Beam Lithography remodel, LaB6 upgrade,integrated with STM,AFM,Heating Stage;Cryo Stage;Tensile Stage;Micro-nano manipulator etc. System also has multiple interface at chamber for attaching most of the analysis detector in the market
Standard EM6900 with maximum resolution you could get from tungsten filament SEM and also has the most convenient detector bundling SE+BSE, comparing with EM6200 it has upgraded sample stage,upgraded objective also the vacuum pathways optimization which is friendly to the customer who’s willing to do the extension analysis based on the tungsten filament SEM.
Muti-language operation system,integrated control panel, customer could control the whole unit simply with mouse and keyboard,comprehensive after-sales service plan with lifelong technical support.
Advanteges:
◆ High resolution
◆ Upgradeable LaB6,huge sample stage etc
◆ Multiple modification schemes
◆ Full set of automated software
◆ Low maintainance cost
Specifications:
| Item | EM6900 Std Tungsten Filament SEM | |
| Resolution | 3nm@30KV(SE) 6nm@30KV(BSE) | |
| Magnification | Negative Magnification:6X～300000X Screen Magnification:12X～600000X | |
| Electron Gun | Tungsten Heated Cathode-Pre Centered Tungsten Filament Cartridge | |
| Accelerating Voltage | 0 ~ 30KV | |
| Lens System | Three-level electromagnetic lens(Tapered lens) | |
| Objective Aperture | Molybdenum aperture adjustable outside vacuum system | |
| Specimen Stage | Five axes stage | |
| Travel | X(Auto) | 0 ~ 80mm |
| Range | Y(Auto) | 0 ~ 60mm |
| Z(Manual) | 0 ~ 50mm | |
| R(Manual) | 360° | |
| T(Manual) | -5° ~ 90° | |
| Max Specimen Diameter | 175mm | |
| Detector | High vacuum secondary electron detector | |
| Semiconductor four segmentation back scattering detector | ||
| IR CCD | ||
| Modification | Stage Upgrade;EBL; STM; AFM; Heating Stage; Cryo Stage; Tensile Stage ; Micro-nano manipulator; SEM+Coating Machine;SEM+Laser | |
| Accessories | LaB6,X-Ray Detector(EDS),EBSD,CL,WDS,Coating Machine | |
| Vacuum System | Turbo Molecular Pumps;Rotation Pump | |
