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99.8% High Purity Alumina Ceramic Arm For Wafer Drive Of Semiconductor

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99.8% High Purity Alumina Ceramic Arm For Wafer Drive Of Semiconductor

Country/Region	china
City & Province	zhengzhou henan
Categories	Steel Sheets

Product Details

99.8% High Purity Alumina Ceramic Arm For Wafer Drive Of Semiconductor

ZG Ceramic produced Ceramic arm for wafer drive of semiconductor feature good structural strength, high temperature resistance, high pressure resistance, good accuracy, good parallelism, high density and uniform organization. For many years, it has been used by the semiconductor manufacturing plant.

ZG Ceramic boasts a group of excellent engineers and enjoys a unique high-profile technology in the special-shaped ceramic processing projects. Special-shaped processing technology is the strengths of ZG Ceramics.

Fields Served:

Shadow frame, Large format plate, Shield Base, Roller & Bushing in Flat Panel Display
Clamp Ring, Chamber Liner, Carrier (SiC) in LED manufacture
Etch system components, CVD, PVD components, Implant components in Semi-Conductor
Wearing components, Custom components in New Energy field
Wearing components, Grinding & Milling (Zirconia), Custom components in Industrial Machinery

Specification:

特性项目 Items			三氧化二铝 Al2O3
材质编号 Material No.			A99	A997	A997LT	A998	A999
颜色 Color			白 White	象牙色 Ivory	象牙色 Ivory	象牙色 Ivory	象牙色 Ivory
纯度 Purity (Wt%)			≥99%	≥99.7%	≥99.7%	≥99.8%	≥99.9%
密度 Density	g/cc	ASTM-C20	3.8	3.92	3.92	3.93	3.94
吸水率 Water Absorption	%	ASTM-C373	0	0	0	0	0
HV硬度 HV Hardness	GPa	ASTM C1327-03	15	17	16	18	18
抗弯强度 Flexural Strength	MPa	ASTM C1161-02	365	370	390	400	400
抗压强度 Compressive Strength	MPa	ASTM C773	2450	2500	2500	2500	2600
弹性衡量 Elastic Modulus	GPa	ASTM C1198-01	360	375	385	385	385
波松比 Poisson's Ratio	-	ASTM C1198-01	0.23	0.23	0.23	0.23	0.23
断裂韧性 Fracture Toughness	Mpa*m^1/2	ASTM C1421-01	3	4	4	4	4
膨胀系数 Thermal Expansion R.T	×10^-6/℃ R.T 400 ℃	ASTM C372-94	7.2	8.2	8.2	8.2	8.2
热传导率 Thermal Conductivity	W/(M.K)	ASTM C408-88	29	32	32	32	33
耐热冲击 Thermal Shock Resistance	℃	-	200	200	200	200	200
介电强度 Dielectric Strength	KV/mm	ASTM D149-97	15	15	15	16	18
体积电阻率 Volume Resistivity	Ω.cm×10¹⁴	ASTM D257-99 (20°C)	1	1	1	1	1
介电常数 Dielectric Constant	-	ASTM D150-98 (1 MHz)	9.9	9.9	9.9	9.9	9.7
介电损耗 Dielectric Loss tangent	(×10^-4)	ASTM D150-98 (1 MHz)	20	10	<2	10	5
硝酸(60%), 90°C HNO3	WT loss mg/cm²/D	-	0.1	<0.05	<0.05	<0.05	<0.03
硫酸(95%), 95°C H2SO4	WT loss mg/cm2/D	-	0.33	<0.23	<0.23	<0.23	<0.2
氢氧化钠(30%), 80°C NaOH	WT loss mg/cm2/D	-	0.26	<0.04	<0.04	<0.04	<0.02