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MoSi2 heating elements for SEMICONDUCTOR, Diffusion and LPCVD furnaces for silicon wafers
MoSi2 Heating Element introduction :
Molybdenum Disilicide (MoSi2) Heating Elements are used in electric furnaces to deliver heating at temperatures as high as 3,362ºF (1,850ºC). Used in production furnaces, laboratory equipment, glass melting and many other applications, these elements are available in a number of different configurations and available with custom design options to meet the specific needs of your facility or operations.
UNIQUE PROPERTIES
Moly-D heating elements are manufactured by powder metallurgy. They consist of molybdenum disilicide with additives that prevent recrystallization. Since Moly-D is completely stable up to 1800ºC (3270°F), it surpasses other heating element types for high temperature performance.
The resistance of Moly-D elements to oxidation lies in the formation of an impermeable quartz, or glass-like protective layer which re-forms when heated if damaged in operation.
The Moly-D element has a low specific electrical resistivity with a positive resistance-temperature characteristic. It can be used at a very high watt loading compared to metallic heating elements. Because of its high temperature oxidation resistance, Moly-D electrical resistance remains constant at constant temperature over its useful life. This permits the use of old and new elements together in the same furnace, even if series-connected.
Molybdenum Disilicide Heating Elements Feature
1. High temperature for various electric furnaces.
2. Long life combined with ease of replacing failed elements
3. Can be used continuously or intermittently
4. New and old elements can be connected in series
5. High power concentration may be applied
Molybdenum Disilicide Heating Elements Parameters
* Shape: I, U, UL, W, WL, Irregular
* Diameter: 3/6, 4/9, 6/12, 7/12, 7/14, 9/18, 12/24(mm)
* Temperature: 1700°C, 1750°C, 1800℃
Physical property of Silicon Molybdenum Rod :
| Physical properties | ||||
| Volume Density | Bend Strength | Porosity Rate | Water Absorption | Hot Extensiblity |
| 5.5-5.6g/cm³ | 15-25kg/ cm2 | 7.4% | 1.2% | 4% |
Oxygen-resistance under high temperature: in oxidizing atmosphere, a layer of compact quartz protective film is formed on the surface of element owing to the high temperature combustion, which prevent Mosi2 from oxidizing more. When the element temperature is higher than 1700 °C, the film becomes melting. It’s not suitable for long time use in the temperature range of 400-700°C, otherwise, the element will be powdering for the strong oxidation under low temperature.
Max temperatures of MoSi2 Heating Element in Different Atmospheres
| Atmosphere | Max. element temperature | |
| MS1700 | MS1800 | |
| Air | 1700℃ | 1800℃ |
| Nitrogen | 1600℃ | 1700℃ |
| Argon, Helium | 1600℃ | 1700℃ |
| Hydrogen | 1100-1450℃ | 1100-1450℃ |
| N2/H2 95/5% | 1250-1600℃ | 1250-1600℃ |
| Applications | Heat treatment Forging Sintering Glass melting Refining Radiant tubes | Laboratory furnaces Testing equipment High temperature sintering production furnaces |
Molybdenum silicon heating elements specification:
| Material Grade | 1600/1700/1800/1850 |
| Shape | U, I, W, UL |
| Hot zone length | 100-300mm |
| Cold end length | 150-300mm |
| Diameter | 6-9mm |
Molybdenum Disilicide Heating Elements Details
* The applicable temperature is between 500-1700°C
* Max temperature 1800°C
* The element cannot be used for rather long time in 400-700°C
Molybdenum Rod characters:
1. diameter:3/6mm;6/12mm;9/18mm;12/24mm
2. length:Lu length from 150 to 700mm,Le length from 150 to
600mm,customized is available .
3. operation temperature: from 500C to 1700.C .Max temperature can
up to 1800.C
4. shape : U type ; W type ;straight type ;L type
5. function: ceramic ,magnetic material,glass ,metallurgy
,fireproofing material furnace.
Mosi2 heating element consists of hot zone and cold zone, the
welding point is beautiful ,smoothly, without bump
The Advantages of Molybdenum Disilicide Heating Elements:
1· Economical, clear and safe.
2· Superior oxidation resistance, low corrosion.
3· Little deformation and better radiance.
4· Long service life, easy installation and maintenance.
5· Efficiently apply a wide range of products and atmospheres
6. Our fast and professional transportation:
Packing and shipping :
Packaging Details: Packed with sponge and box case, and then put it into wooden case.
Lead Time: Shipped in 10 days after payment Transportation: Most by air.
