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A key precursor in the chemical vapor deposition (CVD) process Gas Tungsten Hexafluoride

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A key precursor in the chemical vapor deposition (CVD) process Gas Tungsten Hexafluoride

Country/Region	china
Categories	Other Organic Chemicals

Product Details

Product Description

Tungsten hexafluoride gas, also known as WF6, is a compound composed of tungsten (W) and fluorine (F) atoms. It is a colorless, highly reactive, and corrosive gas. Here are some key points about tungsten hexafluoride gas:

Chemical Formula: WF6
Molecular Weight: 297.84 g/mol
Physical Properties: Tungsten hexafluoride is a dense gas with a boiling point of approximately 17.1 °C (62.8 °F) and a melting point of -2.5 °C (27.5 °F). It is soluble in organic solvents such as benzene and carbon tetrachloride.
Reactivity: WF6 is highly reactive and readily reacts with water vapor in the air to form tungstic acid and hydrofluoric acid, which are corrosive. It reacts vigorously with many metals, metal oxides, and metal halides.
Applications: Tungsten hexafluoride gas is primarily used in the semiconductor industry for the deposition of thin films of tungsten during the fabrication of integrated circuits. It is a key precursor in the chemical vapor deposition (CVD) process, which allows the controlled growth of tungsten layers with high purity and uniformity.
Safety Considerations: WF6 is corrosive and toxic. It can cause severe burns upon contact with the skin, eyes, or respiratory system. Proper safety precautions, including the use of appropriate personal protective equipment and handling procedures, should be followed when working with or handling this gas.
Storage and Handling: Tungsten hexafluoride gas is typically stored in high-pressure cylinders or as a liquid under pressure. Specialized storage and handling facilities are required due to its reactivity and corrosiveness.

It's important to note that tungsten hexafluoride gas should be handled by trained professionals in controlled environments, adhering to safety guidelines and regulations to ensure proper usage and prevent accidents or adverse health effects.

Basic Info.

Model NO.	WF6	Transport Package	Cylinder
Specification	10L/15kg	Trademark	CMC
Origin	Suzhou, China	HS Code	2812190091
Production Capacity	200t/Year

Product Spec:

Tungsten Hexafluoride WF6 GAS
CAS No.: 7783-82-6
EINECS No.: 232-029-1
UN No.: UN2196
Purity: 99.999%
Dot Class: 2.3
Appearance: Colorless
Grade Standard: Electron Grade,Industrial Grade

The COA of Product:

Test items	Units	Quality requirements	Test results
CF4	ppm	<0.5	<0.01
O2	ppm	<0.5	<0.01
N2	ppm	<1	0.03
CO	ppm	<0.5	<0.02
CO2	ppm	<0.5	<0.01
SiF4	ppm	<0.5	<0.1
SF6	ppm	<0.5	<0.1
HF	ppm	<5	0.19
Al	ppb	≤10	<0.020
As	ppb	≤10	<0.001
B	ppb	≤10	<0.005
Ca	ppb	≤5	<0.200
Cd	ppb	≤2	<0.001
Cr	ppb	≤10	<0.020
Fe	ppb	≤10	<0.007
K	ppb	≤5	<0.100
Mn	ppb	≤10	<0.001
Na	ppb	≤5	<0.040
Th	ppb	≤0.1	<0.001
Ti	ppb	≤10	<0.002
Li	ppb	≤10	<0.002
U	ppb	≤0.05	<0.001
Zn	ppb	≤10	<0.005
Si	ppb	≤10	<0.100
Pb	ppb	≤10	<0.001
P	ppb	≤2	<0.300
Mg	ppb	≤10	<0.020
Ni	ppb	≤20	<0.030
Cu	ppb	≤5	<0.005
Mo	ppb	≤10	<0.001
Total impurities of other metal	ppb	≤500	<0.0010

Detailed Photos

Electron Grade Tungsten Hexafluoride Wf6 Gas

Shanghai Kemike Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.

Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.