Plane Scanning Atomic Force Microscope
- Gantry scanning head design, marble base, vacuum adsorption stage,
sample size and weight are basically unlimited
- A62.4510 + Closed-loop three-axis independent pressure shift
scanner, which can scan with high precision in a wide range
- Intelligent needle feeding method with automatic detection of
motor-controlled piezoelectric ceramics to protect probes and
samples
- Automatic optical positioning, no need to adjust focus, real-time
observation and positioning probe sample scanning area
- Equipped with closed metal shield, pneumatic shock-absorbing table,
strong anti-interference ability
◆ The first commercial atomic
force microscope in China to realize combined mobile scanning of
probe and sample;
◆ The first in China to use a
three-axis independent closed-loop piezoelectric shift scanning
table to achieve large-scale high-precision scanning;
◆ Three-axis independent
scanning, XYZ does not affect each other, very suitable for
three-dimensional material and topography detection;
◆ Electric control of sample
moving table and lifting table, which can be programmed with
multi-point position to realize fast automatic detection;
◆ Gantry scanning head design,
marble base, vacuum adsorption and magnetic adsorption stage;
◆ The motor automatically
controls the intelligent needle feeding method of the piezoelectric
ceramic automatic detection to protect the probe and the sample;
◆ High magnification auxiliary
optical microscope positioning, real-time observation and
positioning of probe and sample scanning area;
◆ The closed-loop piezoelectric
scanning stage does not require nonlinear correction, and the
nanometer characterization and measurement accuracy is better than
99.5%.
| A62.4510 | A62.4511 |
Work Mode | Contact Mode Tapping Mode
【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode | Contact Mode Tapping Mode
【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Current Spectrum Curve | RMS-Z Curve F-Z Force Curve | RMS-Z Curve F-Z Force Curve |
XY Scan Mode | Probe Driven Scanning, Piezo Tube Scanner | Sample Driven Scanning, Closed Loop Piezoelectric Shift Scanning
Stage |
XY Scan Range | 70×70um | Closed Loop 100×100um |
XY Scan Resolution | 0.2nm | Closed Loop 0.5nm |
Z Scan Mode | | Probe Driven Scanning |
Z Scan Range | 5um | 5um |
Z Scan Resolution | 0.05nm | 0.05nm |
Scan Speed | 0.6Hz~30Hz | 0.6Hz~30Hz |
Scan Angle | 0~360° | 0~360° |
Sample Weight | ≤15Kg | ≤0.5Kg |
Stage Size | Dia.100mm
【Optional】 Dia.200mm Dia.300mm | Dia.100mm
【Optional】 Dia.200mm Dia.300mm |
Stage XY Moving | 100x100mm, Resolution 1um
【Optional】 200x200mm 300x300mm | 100x100mm, Resolution 1um
【Optional】 200x200mm 300x300mm |
Stage Z Moving | 15mm, Resolution 10nm 【Optional】 20mm 25mm | 15mm, Resolution 10nm 【Optional】 20mm 25mm |
Shock-Absorbing Design | Spring Suspension
【Optional】 Active Shock Absorber | Spring Suspension
【Optional】 Active Shock Absorber |
Optical System | Objective 5x 5.0M Digital Camera
【Optional】 Objective 10x Objective 20x | Objective 5x 5.0M Digital Camera
【Optional】 Objective 10x Objective 20x |
Output | USB2.0/3.0 | USB2.0/3.0 |
Software | Win XP/7/8/10 | Win XP/7/8/10 |
Main Body | Gantry Scan Head, Marble Base | Gantry Scan Head, Marble Base |
Microscope | Optical Microscope | Electron Microscope | Scanning Probe Microscope |
Max Resolution (um) | 0.18 | 0.00011 | 0.00008 |
Remark | Oil immersion 1500x | Imaging diamond carbon atoms | Imaging high-order graphitic carbon atoms |
| | |
Probe-Sample Interaction | Measure Signal | Information |
Force | Electrostatic Force | Shape |
Tunnel Current | Current | Shape, Conductivity |
Magnetic Force | Phase | Magnetic Structure |
Electrostatic Force | Phase | charge distribution |
| Resolution | Working Condition | Working Temperation | Damge to Sample | Inspection Depth |
SPM | Atom Level 0.1nm | Normal, Liquid, Vacuum | Room or Low Temperation | None | 1~2 Atom Level |
TEM | Point 0.3~0.5nm Lattice 0.1~0.2nm | High Vaccum | Room Temperation | Small | Usually <100nm |
SEM | 6-10nm | High Vaccum | Room Temperation | Small | 10mm @10x 1um @10000x |
FIM | Atom Level 0.1nm | Super High Vaccum | 30~80K | Damge | Atom Thickness |
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