Atop Industry Co.,Ltd |
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Vacuum magnetron sputtering coating machine working principle:the
so-called "splash", the electrons in
an electric field under the action of accelerating the process of
flying to the substrate with argon atom
collision, ionization out large amounts of argon ions and
electrons.The electron flies toward the substrate,
the argon ion speeds up the target material under the action of the
electric field, sputtering out a large
number of target atom, and the neutral target atom (or molecule) is
deposited on the substrate to form the
film.Secondary electron in accelerating to fly to the substrate by
magnetic field in the process of lorentz
magnetic force, the influence of confined area near the target
surface plasma, the plasma density in the
area is very high, secondary electron under the action of magnetic
field around the target surface is
circular motion, the electron motion path is very long, constantly
in the process of movement of the impact
ionization out large amounts of argon ion bombardment of target,
after many times of collision of the
electron energy gradually reduce, cast off the yoke of the magnetic
field lines, away from the target
material, the final deposition on the substrate.
1.The Vacuum coating chamber, valves and piping are made of
stainless steel vacuum chamber effective
diameter from Φ500 mm to Φ2000 mm.
2. The vacuum system consists of mechanical pump, rotary vane pump,
roots pump and a cold well high
vacuum oil diffusion pump or molecular pump;
3. The coating system adopts multiple flat target or cylindrical
target, with multiple dc power or medium
frequency power supply.
4. The auxiliary pumping system adopts a low-temperature water
vapor trap;
5. The gas flow meter and flow control (display) control of the
pneumatic system are adopted.
6. The electric control system shall set up circuit overload, water
breaking and sound alarm device of the
broken air;
7. Control system (touch screen + PLC), display detailed parameters
in real time, fully automatic control of
the entire production process, and automatic storage of process
parameters.
8. The equipment is equipped with high power bias system and the
ionizing source auxiliary deposition
coating;
1. The high energy emitted by sputtering has significantly enhanced
the membrane density and adhesion.
2. The workpiece frame adopts the public rotation structure, which
can set the automatic positive and
backward rotation, and the product is even good.
3. Reasonable configuration, quick pumping rate, low noise, low
energy consumption.
4. The film layer deposited by this equipment can meet customer
requirements in terms of density,
uniformity, purity and hardness.
5. The touch screen +PLC can achieve full automatic control,
automatic/manual switching.
| Jewellery Rose Gold Multi-arc Vacuum Magnetron Sputtering Coating Machine |
| Decide according to the substrate size and output |
Substrate | |
| High-grade decorative coating. |
Coating Color | |
Applications | |
Structure | |
Coating Material | |
Features | |